Wafer Robotics
001-0000R41
Brooks Automation Z-BOT Wafer Indexer
About this part
Brooks Automation 001-0000R41 is a Z-BOT wafer indexer for semiconductor wafer-handling equipment. The archived unit’s manufacturer nameplate confirms the exact model string, including the embedded R. Neighboring 001-0000-41 and other Z-BOT identifiers are not exact aliases. Wafer size, travel, end-effector arrangement, controller, interface, payload, and motion-performance ratings must be verified against the unit and host tool before service or replacement
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Model number | 001-0000R41 |
| Product marking | Z-BOT |
| Equipment type | Wafer indexer |
| Industry | Semiconductor wafer handling |
Z-BOT Family Service and Replacement Context
The legacy Brooks Zbot family uses a frog-leg arm architecture. Hine Automation describes its HAtm-5.0 atmospheric robot as designed to replace Brooks Zbot robots, but this family-level relationship does not establish drop-in compatibility with 001-0000R41. Confirm mounting footprint, vertical travel, arm geometry, end effector, wafer size, controller/interface, and host-tool software before substitution.
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $6,955.67 to $6,955.67. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 001-0000R41 / Z-BOT WAFER INDEXER / BROOKS AUTOMATION