Wafer Robotics
001-1570-97
Brooks Automation MTR5 Dual Robot Arm Set
About this part
001-1570-97 is a Brooks Automation wafer-handling robot arm set identified in stored auction history and exact listing records as a dual robot arm / MTR5 MultiTran 5 arm set. Listing evidence associates the part with Novellus Concept Two C2 CVD service context, Novellus part numbers 22-11341-00 and 22-027510-00, and Brooks robot frog-leg arm wording including 001-5867-01 and 000-1293-02 context. No verified official Brooks datasheet or manual for this exact arm set is currently available, so compatibility should be verified from the physical arm set and the installed robot/tool documentation
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part identifier | 001-1570-97 |
| Device type | Dual robot arm set / frog-leg robot arm assembly |
| Brand lineage | Brooks Automation wafer-handling robotics; stored and external evidence also uses Brooks / PRI-style wording |
| Observed robot family | MTR5 / MultiTran 5 context appears in exact listing evidence for 001-1570-97 |
| Observed arm-set wording | Exact listing records describe 001-1570-97 as Brooks dual robot arms and as a Brooks Automation MTR5 arm set |
| Observed Novellus context | Stored and listing evidence associates 001-1570-97 with Novellus Concept Two C2 CVD service context |
| Observed Novellus part numbers | External and stored listing evidence includes Novellus 22-11341-00 and 22-027510-00 context for 001-1570-97 |
| Observed frog-leg context | External inventory evidence describes 001-1570-97 as Brooks robot frog-leg arms with 001-5867-01 and 000-1293-02 context |
| Observed compatible-platform context | External MTR5 armset service listings associate the MTR5 arm set family with selected 200 mm wafer-handling tools; exact tool compatibility should be verified before use |
| Primary function | Mechanical wafer-transfer arm set used by compatible Brooks MTR5 / MultiTran 5 wafer-handling robots |
| Service role | Replacement or refurbishment candidate for robot arm, frog-leg, and dual-arm wafer-transfer service work |
| Mechanical checks | Inspect bearings, pivots, links, wrist/end-effector mounting faces, alignment features, fasteners, wear surfaces, and collision damage before installation |
| Contamination checks | Verify chamber history, particle cleanliness, corrosion, surface damage, and cleaning requirements before reuse in semiconductor process equipment |
| Compatibility boundary | Robot model, chamber geometry, handedness, blade/end-effector interface, calibration offsets, and tool generation must be verified from the installed system and physical part |
| Application domain | Semiconductor wafer handling, vacuum or atmospheric transfer robotics service, and MTR5/MultiTran 5 arm-set replacement research |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $907.51 to $1,288.34. Based on 4 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks robot arm 001-1570-97
- Brooks 001-1570-97 Dual Robot Arms MTR5 MultiTran 5 Novellus 22-027510-00 Spare
- Brooks Automation 001-1570-97 Dual Robot Arms Novellus 22-11341-00 Working
- 001-1570-97/ ARMS BROOKS ROBOT FROG LEGS 001-5867-01 / BROOKS AUTOMATION