Wafer Robotics
001-2980-43
Brooks Automation VWA 2 Vacuum Wafer Aligner
About this part
Brooks Automation 001-2980-43 is identified as a VWA 2 vacuum wafer aligner for semiconductor vacuum-wafer handling equipment. Brooks documentation for the InLigner vacuum-aligner architecture describes rotational wafer scanning for edge-fiducial location and eccentricity, with alignment data supporting an offset robot pickup for centering. Wafer size, substrate compatibility, controller interface, and installed options remain configuration-specific
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 001-2980-43 |
| Observed product designation | VWA 2 |
| Equipment type | Vacuum wafer aligner |
| Operating context | Semiconductor vacuum-wafer handling equipment |
InLigner-Family Alignment Function
Brooks documents these operating principles for its vacuum-aligner modules. They describe the relevant product architecture but do not establish the options installed on 001-2980-43.
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $2,000.89 to $2,000.89. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 001-2980-43 / VACUUM WAFER ALIGNER VWA 2 / BROOKS AUTOMATION