Wafer Robotics

001-2980-43

Brooks Automation VWA 2 Vacuum Wafer Aligner

About this part

Brooks Automation 001-2980-43 is identified as a VWA 2 vacuum wafer aligner for semiconductor vacuum-wafer handling equipment. Brooks documentation for the InLigner vacuum-aligner architecture describes rotational wafer scanning for edge-fiducial location and eccentricity, with alignment data supporting an offset robot pickup for centering. Wafer size, substrate compatibility, controller interface, and installed options remain configuration-specific

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Automation
Part number001-2980-43
Product familyConfiguration-specific
Device typeWafer Aligner
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics

Specifications

Identification
ManufacturerBrooks Automation
Part number001-2980-43
Observed product designationVWA 2
Product
Equipment typeVacuum wafer aligner
Application
Operating contextSemiconductor vacuum-wafer handling equipment

InLigner-Family Alignment Function

Brooks documents these operating principles for its vacuum-aligner modules. They describe the relevant product architecture but do not establish the options installed on 001-2980-43.

Wafer handlingUses underside wafer contact and sensing techniques for rotational and translational wafer positioning.
DetectionRotates a randomly oriented wafer while scanning for edge-fiducial location and eccentricity.
Robot coordinationEccentricity data permits an offset pickup that centers the wafer on the robot end effector.

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$2,000.89Based on archived listing records
Recorded price range$2,000.89 - $2,000.89Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $2,000.89 to $2,000.89. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • 001-2980-43 / VACUUM WAFER ALIGNER VWA 2 / BROOKS AUTOMATION

Archived listings

Other Part Numbers & Aliases

001-2980-43Brooks Automation 001-2980-43Brooks 001-2980-43Brooks Automation 001-2980-43 VWA 2