Boards and Controllers
001-4130-03
Brooks Automation VCE / Wafer Aligner Controller
About this part
001-4130-03 is a Brooks Automation VCE controller and wafer aligner electronics module assembly associated with Brooks InLigner / vacuum wafer aligner equipment. surplus records identify it as a wafer aligner controller, VCE controller, and aligner controller; manual excerpt evidence identifies it as an InLigner electronics module assembly in a VWA 2 InLigner vacuum wafer aligner parts list. Exact revision, installed PCB set, firmware, chamber compatibility, controller interface, and service state must be verified from the physical assembly and host tool documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | 001-4130-03 |
| Device type | VCE controller / wafer aligner electronics module assembly |
| Manufacturer family | Brooks Automation semiconductor automation and wafer-handling equipment |
| Associated tool family | Brooks InLigner / VWA 2 InLigner vacuum wafer aligner context appears in manual excerpt evidence |
| Manual-excerpt description | InLigner electronics module assembly |
| Parts-list position | Listed as item 2, quantity 1, in a VWA 2 InLigner vacuum wafer aligner assembly parts list |
| Wafer handling role | Controller assembly for wafer alignment / vacuum wafer aligner electronics |
| Observed wafer-size context | One surplus record classifies a Brooks Automation 001-4130-03 wafer-handler listing with 8 inch wafer size context |
| Chassis component | Manual excerpt lists 001-4121-01 chassis within the InLigner electronics module assembly |
| Cover component | Manual excerpt lists 001-4128-01 top cover within the InLigner electronics module assembly |
| Video PCB component | Manual excerpt lists 001-4051-01 aligner video PCB assembly within the InLigner electronics module assembly |
| Main PCB component | Manual excerpt lists 001-1951-02 aligner main PCB assembly within the InLigner electronics module assembly |
| Power conversion component | Manual excerpt lists 001-5104-02 DC-DC converter PCB assembly within the InLigner electronics module assembly |
| Backplane cable component | Manual excerpt lists 001-4913-01 MCC3 backplane PCB cable assembly within the InLigner electronics module assembly |
| Repairable-exchange context | A surplus inventory record describes 001-4130-03 as a VCE controller with repairable exchange |
| Compatibility rule | Installed revision, board population, firmware, harnessing, and tool compatibility must be matched to the host Brooks aligner and chamber configuration |
| Inspection priority | Confirm part-number label, revision marking, connector condition, PCB damage, firmware labels, and any repair/test documentation before installation |
| Application domain | Semiconductor wafer handling, vacuum wafer alignment, robot/aligner service parts, and legacy Brooks Automation equipment support |
Part Photos
9 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $4,540.00 to $13,807.03. Based on 8 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS 001-4130-03 Used Controller 001-4130-03
- BROOKS 001-4130-03 Used Controller 001-4130-03 001-4130-03
- Brooks automation, 001-4130-03, Aligner controller
- Brooks robot aligner tel chamber, sold as is,no return 001-4130-03
- BROOKS 001-4130-03 Used Controller 1-Year Warranty ! 100% Test