Wafer Robotics

001-5370-69

Brooks Automation MTR5 / VacuTran 5 Robot Arm

About this part

001-5370-69 is a Brooks Automation service-part identifier observed in Sonisys auction records and exact listing evidence as a robot arm associated with MTR5 / VacuTran 5 wafer-handling equipment. Official Brooks pages support the current Brooks Automation semiconductor vacuum-automation and wafer-handling context, but no verified official exact-part datasheet, drawing, manual, compatibility matrix, or PDF is currently available for 001-5370-69. Treat wafer size, arm geometry, end-effector details, revision, host-robot compatibility, and interchangeability as physical-label and OEM-documentation checks

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (5)Listing history

Brooks Automation 001-5370-69 MTR5 wafer robot arm auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Automation

Part number001-5370-69

Product familyConfiguration-specific

Device typeWafer Handling Assembly

Configuration statusConfiguration varies

Application classWafer automation

CategoryWafer Robotics

Specifications

Identification

Part identifier	001-5370-69
Manufacturer context	Brooks Automation semiconductor automation and wafer-handling context
Observed exact-part role	Stored Sonisys auction evidence and exact listing evidence identify 001-5370-69 with Brooks Automation robot-arm wording for MTR5 / VacuTran 5 equipment; this is observed identity context, not an official model-wide specification

Applications

Application domain

Semiconductor wafer-handling robot arm service context for Brooks Automation vacuum automation equipment

Configuration

Configured-unit rule	Wafer size, blade or arm geometry, end-effector style, mounting pattern, revision, installed side, and host-robot compatibility must be verified from the physical part, the installed robot, and OEM tool documentation
Verification boundary	Do not infer interchangeability with 001-5370-02, 001-5370-18, 001-5370-46, 001-7600 series robot drives, or other Brooks arm identifiers without a matching full part label and host-tool requirement

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$1,207.22Based on archived listing records

Recorded price range$1,207.22 - $1,207.22Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $1,207.22 to $1,207.22. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks Automation 001-5370-69 VacuTran 5 MTR5 Dual Robot Arm Working

Archived listings

Other Part Numbers & Aliases

001-5370-69Brooks 001-5370-69Brooks Automation 001-5370-69