Wafer Robotics
001-7500-05
Brooks Automation VacuTran 5 VTR-5 Vacuum Robot Car Assembly
About this part
Brooks Automation 001-7500-05 identifies a configured VacuTran 5 VTR-5 robot-car assembly for vacuum wafer transport in semiconductor process equipment. Exact-part repair records associate the -05 suffix with an LPE configuration supplied without the A/P assembly, so the identifier does not by itself establish that an arm set, end effector, controller, teaching pendant, or cables are included. VacuTran 5 is the single-arm member of Brooks’ legacy VTR-5/MTR-5 vacuum-robot generation
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation; legacy repair catalogs also identify the manufacturer as Brooks Instrument |
| Part number | 001-7500-05 |
| Product family | VacuTran 5 |
| Robot designation | VTR-5 |
| Assembly description | VTR-5 robot car, LPE configuration, cataloged without the A/P assembly |
| Equipment class | Vacuum wafer-transfer robotics for semiconductor process equipment |
| Year introduced | 1992 |
| Motion control | Upgraded digital motion control |
| Rotational-axis seal | Ferro-fluidic seal |
| Drive mechanism | Servo motor and capstan |
| Arm architecture | Single frog-arm/band joint; the exact -05 car assembly is cataloged without its A/P assembly |
| Maximum reach | 860 mm |
| Placement repeatability | 0.26 mm |
| Manufacturer-reported reliability qualification | More than 1,000,000 mean cycles between failures; approximately 5,500 hours under the stated typical three-module, 30-wafers-per-hour cluster-tool duty cycle |
Configuration boundary
The configured suffix and omitted subassembly materially affect replacement decisions.
VTR-5 and MTR-5 identification boundary
Brooks documentation and legacy inventory records distinguish the single-arm VTR-5 from the dual-arm MTR-5.
| Identifier group | Robot designation | Family architecture | Judgment |
|---|---|---|---|
| 001-7500-xx | VTR-5 / VacuTran 5 | Single frog-arm/band-joint platform | 001-7500-05 belongs here; suffix-specific configuration still requires verification. |
| 001-7600-xx | MTR-5 / MultiTran 5 | Dual frog-arm/band-joint platform | Sibling family only; these identifiers are not aliases for 001-7500-05. |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $7,500.00 to $7,500.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS ROBOT 001-7500-05 FREE SHIP