Wafer Robotics
001-7500-07
Brooks Automation VacuTran 5 VTR5 Transfer Robot Drive
About this part
001-7500-07 is a Brooks Automation wafer-handling part identifier associated with VacuTran 5 / VTR5 transfer robot drive equipment. Stored Sonisys auction records consistently use the title '001-7500-07 / VACUTRAN 5 VTR5 TRANSFER ROBOT DRIVE / BROOKS AUTOMATION,' and equipment-parts listings also identify the same part number in Brooks VacuTran 5 / VTR5 wafer transfer robot context. Exact robot configuration, controller pairing, arm set, axis drive revision, software/firmware, wafer-size support, and chamber/tool fit must be verified from the physical unit and the host system documentation
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part identifier | 001-7500-07 |
| Device type | VacuTran 5 / VTR5 wafer transfer robot drive |
| Brand family | Brooks Automation semiconductor wafer-handling equipment |
| Observed product family | VacuTran 5 / VTR5 transfer robot equipment |
| Observed listing description | Stored auction records identify 001-7500-07 as a VacuTran 5 VTR5 transfer robot drive |
| Observed marketplace product context | Marketplace metadata describes Brooks Automation 001-7500-07 in wafer transfer robot VT5 context |
| Equipment role | Wafer transfer robot drive assembly for Brooks vacuum wafer-handling equipment |
| Configuration boundary | Robot generation, controller, arm set, end effector, encoder/motor configuration, firmware/software, wafer size, chamber interface, and host-tool compatibility must be verified before replacement |
| Related-family caution | Other VacuTran 5, VTR5, MTR5, 001-7500, 001-7600, and 001-5500 identifiers appear near this part in listing records but should not be assumed interchangeable |
| Condition-sensitive item | Stored listings describe used equipment; robot drives require mechanical, electrical, encoder, and controller-pairing verification before service use |
| Inspection priorities | Check axis motion, motor/encoder condition, cabling, connectors, home sensors, brake or drive hardware, bearings, arm mounting, vacuum/feedthrough interfaces, controller compatibility, and evidence of shipping damage |
| Application domain | Semiconductor wafer handling, vacuum wafer transfer, and Brooks Automation wafer robotics service parts |
| Hosted official documentation | No official Brooks PDF for this exact 001-7500-07 VacuTran 5 / VTR5 transfer robot drive is currently available in the Sonisys document archive |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $2,850.82 to $2,850.82. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 001-7500-07 / VACUTRAN 5 VTR5 TRANSFER ROBOT DRIVE / BROOKS AUTOMATION