Brooks Automation VacuTran 5 / MTR5 Transfer Robot Drive
About this part
001-7600-07 is a Brooks Automation / PRI Automation wafer-transfer robot identifier associated with VacuTran 5 / MTR5 vacuum robot drive and transfer-robot assemblies. Sonisys auction records and external inventory references identify it as an MTR-5 wafer transfer robot, MTR5 transfer robot driver, VacuTran 5 transfer robot drive, and related theta motor / robot-drive assembly context. Exact robot configuration, arm set, end effector, controller, motor assembly, firmware, wafer size, and tool compatibility must be verified from the physical unit and system documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Brooks Automation / PRI Automation semiconductor wafer-handling automation
Robot family
VacuTran 5 / MTR5 vacuum wafer-transfer robot family
Wafer handling
Primary function
Wafer transfer and robot-drive function in semiconductor vacuum automation systems
Application domain
Semiconductor fabrication, vacuum transfer automation, wafer-transfer robot service, and spare-parts support
System integration
Robot type context
External inventory records identify MTR 5 as a Brooks / PRI Automation wafer-handler and vacuum robot family
Observed description
External listings describe 001-7600-07 as a VacuTran 5 MTR5 transfer robot drive, MTR5 transfer robot driver, MTR5 wafer robot, and MTR-5 wafer transfer robot
Related family configuration
Related VacuTran 5 / MTR5 drive listings identify F07-200 model context, MTR5 configuration, vertical drive assembly mounting, and terminal connections
Observed components
Refurbished driver listing components
One external refurbished-driver listing associates 001-7600-07 with LAM 853-012123-001 harmonic drive arm assembly and Oriental Motor PH265M-31 Vexta 2-phase stepping motor components
Theta motor assembly context
Sonisys auction titles associate 001-7600-07 with MTR5 theta motor assembly 001-1383-06 in at least one stored record
Construction
Related drive assembly construction
Related VacuTran 5 / MTR5 drive listings describe industrial-grade stainless steel and aluminum construction
Applications
Vacuum automation role
Brooks vacuum automation systems support precise wafer handling and transfer within process tools while maintaining positioning and repeatability
Compatibility
Verification boundary
Verify physical part label, serial number, robot revision, arm set, theta drive, motor, end effector, controller, cable set, firmware, wafer size, calibration files, and process-tool compatibility before reuse
Documents
Hosted official documentation
No official Brooks-hosted PDF for 001-7600-07 is currently available in the Sonisys document archive
Part Photos
20 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records10Tracked historical listing records
Historical median price$2,136.07Based on archived listing records
Recorded price range$99.99 - $9,000.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $172.00 to $6,750.00. Based on 10 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks 001-7600-07 MTR5 Theta Motor Assembly 001-1383-06
