Wafer Robotics
001-9010-01
Brooks Automation Load Lock Robot Arm Assembly
About this part
001-9010-01 is a Brooks Automation service-part identifier observed in Sonisys auction records and external exact-part inventory/listing evidence as a semiconductor load-lock robot arm assembly. Official Brooks pages support the manufacturer, semiconductor automation, vacuum automation, support, and documentation-access context, but no verified official exact-part datasheet, manual, drawing, compatibility matrix, or PDF is currently available for 001-9010-01. Treat Novellus, LAM Research, load-lock chamber, arm interface, revision, wafer size, harnessing, and tool-fit details as physical-unit and OEM-support checks
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part identifier | 001-9010-01 |
| Manufacturer context | Brooks Automation semiconductor automation, vacuum automation, and wafer-handling service-part context |
| Observed exact-part role | External exact-part inventory/listing evidence identifies 001-9010-01 with load-lock, semiconductor, Novellus, and robot arm assembly wording; this is observed identity context, not an official model-wide specification |
| Application domain | Semiconductor load-lock and wafer-handling robot arm assembly service context |
| Observed companion part context | One external surplus page lists 001-9010-01 together with 001-9300-05 in a LAM Research load-lock chamber offering; this is listing context only and should not be treated as official compatibility or a required assembly pairing |
| Configured-unit rule | Revision, arm geometry, load-lock chamber interface, robot or controller relationship, harnessing, wafer size, and host-tool compatibility must be verified from the physical unit label, installed system, and OEM support documentation |
| Verification boundary | Do not infer interchangeability with 001-9010-03, 001-9010-09, 001-9010-13, 001-9010-20, 001-9300-05, Novellus assemblies, LAM Research chambers, VCE assemblies, Marathon systems, MagnaTran robots, or any tool-specific assembly without matching the full physical label and OEM support records |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $999.99 to $999.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 001-9010-01 Novellus Load Lock Robot Arm Assembly