Wafer Robotics
002-0016-21
Brooks Automation MagnaTran 7 BiSymmetrik Dual-Pan Arm Set
About this part
Brooks Automation 002-0016-21 is a removable MagnaTran 7 vacuum-robot arm set. Exact-part photographs show opposed dual wrist plates and arm geometry matching Brooks’ BiSymmetrik dual-pan configuration, in which the two arms address opposite directions. The photographed assembly carries the Brooks Automation part-number engraving; wafer size, installed end effectors, payload option, and robot application number remain configuration-specific
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation, Inc |
| Part number | 002-0016-21 |
| Product family | MagnaTran 7 (MAG7) |
| Component type | Replaceable vacuum-robot arm set / arm assembly |
| Arm style | Opposed dual-arm geometry matching the MagnaTran 7 BiSymmetrik dual-pan configuration |
| Arm arrangement | Two arms addressing opposite directions |
| Operating environment | Vacuum wafer handling |
| Supported wafer diameters | 100, 125, 150, 200, or 300 mm with the corresponding end effector; the size for 002-0016-21 is not established by available manufacturer documentation |
| Extension limit | Up to 1050 mm from robot centerline to wafer centerline; arm-set dependent |
| Standard load capacity | 1.0 kg (2.2 lb) per end effector, in addition to end-effector mass |
| High-capacity option | 4.6 kg (10.0 lb) for Single Frogleg and BiSymmetrik arms; presence of this option on 002-0016-21 is not established |
| Maximum arm operating temperature | 120 °C |
| Maximum arm exposure temperature | 120 °C |
| Standard-arm exposed materials | Aluminum, stainless steel, quartz, Kalrez, Viton, and Teflon |
| Arm motion | Radial extension/retraction and unlimited theta rotation are driven through the robot’s T1/T2 coaxial shafts; vertical motion is supplied by a three-axis robot drive when fitted |
| BiSymmetrik transfer benchmark | Typical pick-and-place time of 5.3 s at a 0.3 g acceleration limit or 7.8 s at 0.1 g, measured with 735 mm extension, 180° rotation, 0.4 s Z motion, and a 200 mm wafer |
Configuration-specific identification boundary
The dash number identifies an arm-set assembly, but several operational characteristics are controlled by its end effectors and the robot application configuration.
MagnaTran 7 arm-style reference
Brooks offered three standard MagnaTran 7 arm arrangements. The archived 002-0016-21 geometry corresponds to the opposed-arm arrangement.
| Brooks arm style | Arrangement | Model association |
|---|---|---|
| Frogleg | Single pan and single end effector | MagnaTran 7F |
| BiSymmetrik | Two pans addressing opposite directions | MagnaTran 7B |
| Leapfrog | Two vertically separated end effectors addressing the same direction | MagnaTran 7X |
| Observed 002-0016-21 | Opposed dual wrist plates; end effectors not installed | Geometry matches BiSymmetrik |
Installation and application control
Arm-set replacement is a calibrated robot service operation.
- Use the arm-set part number together with the robot’s application number and Quality Report when restoring or verifying the configuration.
- Retain and use the correct arm mounting/alignment fixture; the arm set must be fully seated on the T1/T2 shafts before operation.
- Check radial home and wrist-plate alignment after installation. Brooks specifies that opposed BiSymmetrik arms should be 180° apart.
- Perform robot alignment whenever arms or end effectors are replaced. Station reteaching may be required after an arm change.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $11,500.00 to $11,500.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 36179 BROOKS ARM ASSY FOR MAG 7 WAFER TRANSFER ROBOT 002-0016-21