Wafer Robotics

002-077512-52

Brooks Automation 300 mm Dual-Arm Wafer Robot Assembly

About this part

Brooks Automation 002-077512-52 identifies a semiconductor wafer-handling robot assembly documented in a dual-arm configuration for 300 mm wafers. No named Brooks robot family, operating environment, motion specification, controller pairing, or host-tool compatibility is assigned to this exact identifier

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Automation

Part number002-077512-52

Product familyConfiguration-specific

Device typeWafer Handling Assembly

Configuration statusConfiguration varies

Application classWafer automation

CategoryWafer Robotics

Specifications

Identification

Manufacturer	Brooks Automation
Part identifier	002-077512-52
Equipment class	Semiconductor wafer-handling robot assembly

Configuration boundary

The documented arm arrangement and wafer size must not be extended into unverified robot-family or interface specifications.

Observed assembly configurationDual-arm wafer robot assembly for 300 mm wafers

Named robot familyNot established for this exact identifier

Operating environmentAtmospheric or vacuum classification is not established

CompatibilityController, end-effector, host-tool, mechanical-interface, and application compatibility must be confirmed from complete assembly records

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$5,005.24Based on archived listing records

Recorded price range$5,005.24 - $5,005.24Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $5,005.24 to $5,005.24. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks Automation 002-077512-52 300mm Wafer Robot Dual Arm Assembly Surplus

Archived listings

Other Part Numbers & Aliases

002-077512-52Brooks 002-077512-52Brooks Automation 002-077512-52