Wafer Robotics
002-0921-08
Brooks Automation VCE5 AM350 Bellows Drive Assembly
About this part
Brooks Automation 002-0921-08 is a drive subassembly for the VCE5 vacuum cassette elevator/load lock. Exact-part evidence identifies an AM350 metal bellows configuration. The parent VCE5 family was developed for 300 mm wafer handling, but electrical, dimensional, travel, and interchangeability specifications have not been established for this exact suffix
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation, Inc |
| Part number | 002-0921-08 |
| Assembly type | Drive assembly |
| Parent equipment | Brooks VCE5 vacuum cassette elevator/load lock |
| Sealing element | Metal bellows |
| Bellows material | AM 350 precipitation-hardening stainless steel (UNS S35000) |
| Industry | Semiconductor vacuum wafer handling |
VCE5 family context
These facts describe the parent VCE5 product family and are not dimensional or performance specifications for drive assembly 002-0921-08.
Compatibility boundary
The complete Brooks part number and the parent tool's build documentation should govern replacement decisions. A common VCE5 designation or physical resemblance does not establish interchangeability with other 002-0921 suffixes or with later VCE generations.
AM350 material context
AM 350 is UNS S35000, a chromium-nickel-molybdenum precipitation-hardening stainless steel used in high-strength edge-welded bellows and high-vacuum equipment. The alloy designation does not establish the heat-treatment condition or mechanical properties of the bellows installed in this assembly.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $2,750.77 to $2,750.77. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 002-0921-08 / ASSY, DRIVE, VCE5, AM350 BELLOWS / BROOKS