Wafer Robotics

002-0921-20

Brooks Automation VCE5 Vacuum Cassette Elevator Robot Assembly

About this part

Brooks Automation 002-0921-20 is a robot assembly for a VCE5 vacuum cassette elevator in semiconductor wafer-handling equipment. The VCE architecture raises and lowers a wafer cassette to present individual slots at the material transport plane. Replacement selection should match the complete part number and the installed unit’s mechanical, electrical, and control interfaces; wafer size and customer-tool compatibility are configuration-specific

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Automation VCE

Part number002-0921-20

Product familyConfiguration-specific

Device typeVacuum cassette elevator robot assembly

Configuration statusConfiguration varies

Application classWafer automation

CategoryWafer Robotics

Specifications

Identification

Manufacturer	Brooks Automation, Inc
Part number	002-0921-20

Product

Product type

Robot assembly for a VCE5 vacuum cassette elevator

System association

VCE generation

VCE5

VCE family context

Elevator function

Raises or lowers a wafer cassette so individual slots align with the material transport plane for wafer transfer; this is a family-level VCE function

Replacement Identification

Controlling identifierBrooks Automation 002-0921-20

Observed associated marking002-0861-02 has appeared with this assembly but is not established as an equivalent or replacement identifier

Configuration checksConfirm VCE generation, mounting, motor and drive arrangement, control board, connectors, cabling, cassette or wafer size, and host-tool interface before substitution

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median priceNot enough dataBased on archived listing records

Recorded price rangeNot enough dataLow to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

Recorded price context is shown when available. Based on 0 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Vacuum cassette Elevator for Brooks KLA ES 25

Archived listings

Other Part Numbers & Aliases

002-0921-20Brooks 002-0921-20Brooks Automation 002-0921-20