Wafer Robotics

002-5177-01

Brooks Automation Reliance ATR8 300mm Wafer Handling Robot

About this part

002-5177-01 is a Brooks Automation Reliance wafer robot identifier. Stored Sonisys auction evidence identifies it as a Brooks Automation wafer robot and Reliance wafer robot, while exact listing evidence identifies it as a 300 mm wafer handling robot with Reliance ATR8 model context and ADE AWIS removal context. Configuration, controller pairing, cable set, end effector, calibration, and tool compatibility must be verified from the physical unit

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Automation
Part number002-5177-01
Product familyConfiguration-specific
Device typeWafer Handling Assembly
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics

Specifications

Identification
Device typeReliance ATR8 300mm wafer handling robot
Manufacturer familyBrooks Automation / PRI Automation semiconductor wafer-handling robotics
Observed exact part number002-5177-01
Robot family
Observed family wordingReliance and Reliance ATR8 wording appears in stored auction evidence and exact listing evidence
Wafer handling
Observed wafer size300 mm wafer handling is stated in exact listing evidence
Observed tool contextExact listing evidence says the robot was removed from an ADE Corporation AWIS 3220 Advanced Wafer system
Mechanical
Observed included hardwareExact listing evidence mentions motor and controller interface cables plus two additional forks; included hardware can vary by physical listing
Condition
Observed storage noteExact listing evidence notes connector oxidation from long-term storage, so inspection of connector condition is important
Function
Primary roleAtmospheric wafer transfer or wafer handling in semiconductor automation equipment
Configuration
Configured-unit ruleRobot arm, end effector, forks, controller interface, cable set, firmware, mapping hardware, calibration, and host-tool compatibility can vary by the physical unit
Applications
Application domainSemiconductor wafer handling, wafer transfer, inspection/metrology tool automation, and Brooks/PRI robotics service
Compatibility
Tool-fit cautionDo not assume compatibility from Reliance or ATR8 wording alone; match the full part number, wafer size, arm/end-effector setup, controller, cables, calibration, and tool requirement
Documents
Documentation statusNo official exact Brooks Automation PDF for 002-5177-01 is currently available in the Sonisys document archive

Part Photos

2 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$5,750.00Based on archived listing records
Recorded price range$5,750.00 - $5,750.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $5,750.00 to $5,750.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Automation Reliance Wafer Robot PN: 002-5177-01
  • Brooks Automation Wafer Robot PN: 002-5177-01

Archived listings

Other Part Numbers & Aliases

002-5177-01Brooks 002-5177-01Brooks Automation 002-5177-01Brooks Automation Wafer Robot PN: 002-5177-01Brooks Automation Reliance Wafer Robot PN: 002-5177-01Brooks Automation 002-5177-01 Wafer RobotBrooks Automation 002-5177-01 Reliance Wafer RobotBrooks Automation 002-5177-01 300mm Wafer Handling RobotBrooks Automation 002-5177-01 Reliance ATR8 300mm Wafer Handling Robot