Brooks Automation AcuTran 7 / ATR-7 Wafer Transfer Robot
About this part
002-7090-04 is a Brooks Automation wafer-transfer robot identifier associated with the AcuTran 7 / ATR-7 atmospheric wafer-handling family. It appears in Sonisys auction records as a semiconductor wafer handling robot and in external equipment references as the robot arm in an ACUTRAN 7 robot and aligner system. Exact arm configuration, end effector, controller, cable set, firmware, wafer handling setup, and tool compatibility must be verified from the physical unit and system documentation
Configurations vary. Verify the exact unit before choosing a replacement.
AcuTran 7 / ATR-7 atmospheric wafer-transfer robot family
Wafer handling
Primary function
Transfers semiconductor wafers at atmospheric pressure in wafer-fabrication automation systems
Application environment
AcuTran 7 is described for non-corrosive atmospheric processing environments
Wafer-size family context
AcuTran 7 family documentation describes 200 mm and 300 mm wafer transport; one documented configured system lists 100 mm to 300 mm wafer handling
Robot arm type
Two-link SCARA-type arm in the documented ACUTRAN 7 configured system
Special handling capability
AcuTran 7 family information identifies off-center wafer pick/place capability and cassette mapping capability
System integration
Typical tool context
Equipment front-end modules and 200 mm / 300 mm cluster-tool applications including etch, PVD, CVD, and RTP process tools
Observed configured system
One ACUTRAN 7 robot and aligner system identifies robot arm p/n 002-7090-04, control module p/n 002-5870-07, wafer aligner p/n 002-7391R07, control pendant, and cables
Power requirement in documented system
The documented configured system specifies customer-supplied 24 V, 30 A power
Motion
Radial axis in documented system
32.16 in range of motion, 24 in/sec speed, and 0.003 in repeatability
Rotational axis in documented system
Infinite range of motion, 360 deg/sec speed, and 0.10 deg repeatability
Z axis in documented system
17.25 in range of motion, 12 in/sec speed, and 0.003 in repeatability
Transfer time in documented system
4.5 seconds
Payload
Load capacity in documented system
1.2 lb
Physical
Weight in documented system
130 lb / 59 kg
Exterior dimensions in documented system
10.750 in width and 27.500 in height
Compatibility
Verification boundary
Verify physical part label, arm geometry, end effector, wafer size setup, controller, cable set, firmware, calibration files, mapping option, power supply, and host-tool compatibility before reuse
Documents
Hosted official documentation
No official Brooks-hosted PDF for 002-7090-04 is currently available in the Sonisys document archive
Part Photos
17 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records6Tracked historical listing records
Historical median price$4,500.00Based on archived listing records
Recorded price range$99.99 - $8,000.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,300.05 to $6,500.00. Based on 6 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Automation Wafer Transfer Handling Robot 002-7090-04 & CONTROLLER 119368
Brooks Automation PN: 002-7090-04
Brooks Automation Model No. 002-7090-04 Semiconductor Wafer Handling Robot
Brooks 002-7090-04 Atmospheric Robot *used working
