002-7200-14 is a Brooks Automation 300 mm wafer load port / load-port module identifier. Stored Sonisys auction records and resale references describe this exact part as a 300 mm load port, including one observed listing with a Fluoroware F300 AutoPod. Brooks' current interface-automation material places Vision LEAP and SMIF VersaPort load ports in semiconductor carrier-interface automation; exact carrier compatibility, door mechanism, mapping option, controller revision, and OEM tool fit must be verified from the physical module label
Configurations vary. Verify the exact unit before choosing a replacement.
Semiconductor carrier interface, wafer loading, wafer transport handoff, process-tool automation, and metrology-tool automation
Platform context
Brooks interface automation role
Brooks describes interface automation as systems supporting material handling, identification, and environmental control across semiconductor manufacturing operations
Load-port family context
Brooks currently lists Vision LEAP load ports and SMIF VersaPort load ports in its interface-automation solution family
Production context
Brooks states that its interface automation has a large 300 mm load-port install base qualified for reliability and cleanliness at advanced semiconductor nodes
Observed configuration
Stored auction identity
Stored Sonisys titles identify this exact part as a Brooks Automation 300 mm load port module
Carrier accessory context
One stored auction title reports the 002-7200-14 load port with a Fluoroware F300 AutoPod
Configuration
Configured-unit rule
Carrier format, door opener mechanism, mapping or sensing hardware, communications, controller electronics, firmware, mounting configuration, and OEM tool fit vary by physical module
Inspection
Replacement checks
Verify the module label, controller part numbers, carrier format, latch/door interface, mapping sensors, cables, mounting pattern, safety interlocks, and tool-specific configuration before replacement
Part Photos
5 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records3Tracked historical listing records
Historical median price$1,950.00Based on archived listing records
Recorded price range$1,000.00 - $2,162.64Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,190.00 to $2,120.11. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
BROOKS AUTOMATION 300MM LOAD PORT MODEL 002-7200-14 w/FLUOROWARE F300 AUTOPOD
Brooks Automation 300mm Load Port Module 002-7200-14, 184402
