Load Ports
002-7200-21
Brooks Automation FOUP / Wafer Load Port
About this part
002-7200-21 is a Brooks Automation FOUP / wafer load port identifier found in semiconductor automation resale channels and Sonisys auction history. marketplace and surplus-equipment records associate it with wafer load-port assemblies, including KLA part number 750-614044-000 in several observed listings. Exact wafer size, controller presence, firmware, cabling, and tool compatibility should be verified against the specific physical unit
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | 002-7200-21 |
| Brand lineage | Brooks Automation semiconductor automation equipment |
| Device type | FOUP / wafer load port module |
| Observed OEM cross-reference | KLA / KLA-Tencor 750-614044-000 appears with this Brooks load-port identifier in observed listings |
| Observed assembly description | ASSY, FLPM and wafer load port wording appear in auction and surplus-equipment records |
| Configured-unit rule | Revision, firmware, harnessing, connector set, and tool compatibility vary by the physical unit and installed system |
| Controller presence | Some observed surplus records describe units with missing or no controllers; controller status must be checked per unit |
| Observed wafer-format wording | Auction records include 200 mm wafer load port wording; other FOUP/load-port references may indicate customer-specific configurations |
| Load-port role | Interface module used to present wafer carriers to semiconductor automation tools |
| Factory automation context | Brooks interface automation products support wafer handling and transport between process steps |
| Typical load-port elements | Related Brooks load-port documentation shows common elements such as LED panel, FIMS door, FOUP advance, service cart, and main board cover |
| Application domain | Semiconductor wafer handling, load-port service, and fab automation spare-parts research |
Part Photos
20 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $300.00 to $3,547.34. Based on 24 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS / 002-7200-21 WAFER LOAD PORT (WITHOUT ROBOT AND ROBOT CONTROLLE/Fedex
- [10446](1UNIT )BROOKS / 002-7200-21 200MM WAFER LOAD PORT (1PC PRICE)/Fedex
- C194706 Brooks Automation Load Port Wafer Boat Loader Robot (p/n 002-7200-21)
- C194896 Brooks Automation LoadPort Wafer Boat Loader Robot (p/n 002-7200-21)
- AMAT Brooks Automation 002-7200-21 Wafer Load Port Inkl. Rechnung
- Brooks Loadport, 002-7200-21 ASSY,FLPM, KLA PN 750-614044-000