Accessories
002-7287-02
Brooks Automation Vacuum / Nitrogen Solenoid Assembly
About this part
002-7287-02 is a Brooks Automation part identifier observed in exact-number surplus records as a vacuum / nitrogen solenoid assembly associated with an ALD atmospheric robot. no verified official exact-part datasheet, manual, drawing, or configuration sheet is currently available. Valve count, electrical ratings, gas compatibility, porting, fittings, pressure limits, mounting, robot compatibility, and installed-system function must therefore be verified from the physical assembly, its component labels, and OEM service documentation
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part identifier | 002-7287-02 |
| Observed manufacturer | Brooks Automation |
| Observed exact-part description | Exact-number surplus records describe 002-7287-02 as a vacuum / nitrogen solenoid assembly associated with an ALD atmospheric robot |
| Automation domain | Brooks material identifies the company as a provider of semiconductor automation, including vacuum and atmospheric automation systems |
| Configured-unit rule | Valve count, electrical ratings, gas compatibility, porting, fittings, pressure limits, mounting, robot compatibility, and installed-system function require physical-label or OEM-document verification |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $306.66 to $306.66. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 002-7287-02 / ASSY, VACNITROGEN SOLENOID ALD ATM ROBO / BROOKS AUTOMATION