Wafer Robotics
002-7391-07
Brooks Automation Wafer Aligner / Pre-Aligner
About this part
002-7391-07 is a Brooks Automation wafer aligner / pre-aligner part number found in historical auction and surplus records. available evidence consistently identifies it as a Brooks or Brooks/PRI wafer aligner, pre-aligner, or atmospheric wafer aligner, but No verified exact official datasheet or service manual is currently available. Sonisys therefore preserves the useful identification, pricing, and image archive while avoiding unsupported claims about wafer size, controller revision, firmware, calibration procedure, or semiconductor tool compatibility
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | 002-7391-07 |
| Device type | Wafer aligner / pre-aligner robotics component |
| Brand lineage | Brooks Automation and Brooks / PRI Automation names appear in stored and marketplace evidence |
| Observed marketplace names | Wafer aligner, wafer pre-aligner, pre-aligner robot, and atmospheric wafer aligner |
| Related observed Brooks aligner family numbers | Surplus pages place 002-7391-07 near related Brooks aligner / pre-aligner numbers including 002-7391-08, 002-7391-38, 002-7391-47, and 002-7391-52 |
| Likely machine function | Wafer centering and/or orientation alignment before robotic wafer handoff, based on repeated wafer aligner and pre-aligner descriptions |
| Configured-unit rule | Revision, label status, firmware, harnessing, controller pairing, connector set, wafer-size support, and tool compatibility vary by the physical unit and installed system |
| Tool-fit caution | Do not assume compatibility with a robot controller, wafer size, load port, or OEM tool from the part number alone |
| Documentation status | No exact Brooks official datasheet, service manual, calibration manual, or integration guide for 002-7391-07 is currently available in the Sonisys document archive |
| Unsupported details avoided | No axis count, motor type, encoder type, wafer diameter, communication protocol, pinout, or calibration procedure is claimed without exact documentation |
| Application domain | Semiconductor wafer handling, atmospheric wafer alignment, and Brooks/PRI automation service-part replacement workflows |
Part Photos
22 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $499.10 to $2,000.00. Based on 11 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS AUTOMATION Wafer Aligner 002-7391-07
- Brooks Automation 002-7391-07 Wafer Aligner Robot
- 002-7391-07 / PRE-ALIGNER / BROOKS AUTOMATION
- BROOKS AUTOMATION 002-7391-07 WAFER ALIGNER,MISSING LABEL
- BROOKS AUTOMATION 002-7391-07 Wafer Pre-Aligner Fast shipping#DHL or FedEx
- Brooks, Aligner, 002-7391-07