002-7391-08 is a Brooks Automation wafer pre-aligner / robot wafer pre-aligner part number found in Sonisys auction history and semiconductor-surplus records. available evidence consistently identifies it as a wafer pre-aligner, wafer aligner prealigner robot, atmospheric prealigner, or robot wafer pre-aligner. Several records associate individual units with 200 mm FEI CLM-3D, Brooks 105947 Series 8 controller, Brooks 017-0483-01 Reliance robot, AIXTRON, and August/Rudolph/Onto contexts, but no verified official exact Brooks datasheet or service manual is currently available Sonisys therefore preserves the identification, pricing, title, and image history while avoiding unsupported claims about wafer-size range, controller compatibility, pinout, calibration procedure, firmware, or tool fit
Configurations vary. Verify the exact unit before choosing a replacement.
Inventory pages place 002-7391-08 near related Brooks pre-aligner numbers including 002-7391-17, 002-7391-22, 002-7391-33, 002-7391-38, 002-7391-47, 002-7391-48, and 002-7391-52
Function
Likely machine function
Wafer centering and/or orientation alignment before robotic wafer handoff, based on repeated wafer pre-aligner and wafer aligner descriptions
Observed associations
200 mm FEI CLM-3D context
Stored and listing evidence includes one Brooks Automation 002-7391-08 200 mm wafer prealigner listing with FEI CLM-3D wording
Brooks 105947 controller context
Stored and evidence includes 002-7391-08 listings paired with Brooks 105947 Series 8 robot controller wording
Brooks Reliance robot context
Available evidence includes a Brooks 017-0483-01 Reliance robot / 002-7391-08 pre-aligner / 105947 controller bundle
AIXTRON context
Stored auction evidence includes one Brooks Automation 002-7391-08 robot wafer pre-aligner listing with AIXTRON wording
August / Rudolph / Onto context
One surplus listing describes compatibility with August Technologies, Rudolph Technology, and Onto Innovation; this is retained as observed listing context, not universal compatibility
Configuration
Configured-unit rule
Wafer size, controller pairing, cable set, firmware, sensor package, label revision, and installed-tool support vary by the physical unit and system
Compatibility
Tool-fit caution
Do not assume compatibility with FEI CLM-3D, AIXTRON, KLA-Tencor, Brooks Series 8, Reliance, August/Rudolph/Onto, or any other tool platform from the part number alone
Documentation
Documentation status
No exact official Brooks Automation datasheet, service manual, pinout, calibration procedure, wafer-size matrix, or integration guide for 002-7391-08 is currently available in the Sonisys document archive
Unsupported details avoided
No axis count, encoder type, motor type, vacuum/atmospheric limit, wafer diameter range, controller protocol, connector pinout, or calibration method is claimed without exact documentation
Condition
Condition varies
Stored and listing evidence includes used, working, fully functional, power-on tested, as-is, untested, and parts/not-working descriptions
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records9Tracked historical listing records
Historical median price$1,139.36Based on archived listing records
Recorded price range$150.00 - $4,900.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $494.00 to $4,579.96. Based on 9 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
AS IS UNTESTED Brooks Automation PN: 002-7391-08 Robot Wafer Pre-Aligner
