Wafer Robotics

002-7391-11

Brooks Automation Wafer Aligner

About this part

Brooks Automation 002-7391-11 is a wafer aligner used in semiconductor wafer-handling automation. Exact-part inventory and auction records consistently classify the component as an aligner. The configured identifier does not establish wafer diameter, axis arrangement, fiducial sensor, controller, interface, utilities, or compatibility with neighboring 002-7391 variants; verify those attributes from the physical unit and target-system bill of materials

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Automation
Part number002-7391-11
Product familyConfiguration-specific
Device typeWafer Aligner
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics

Specifications

Identification
Part number002-7391-11
Manufacturer / brandBrooks Automation
Equipment typeWafer aligner
Function — family level
Alignment roleCenters and orients a wafer before robotic transfer

Configuration and Replacement Boundary

Match the complete 002-7391-11 number, mechanical interface, wafer format, sensor arrangement, connectors, controller assignment, and host-tool software. Similar 002-7391-08, 002-7391-33, and 002-7391R08 identifiers are separate configured parts.

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$600.00Based on archived listing records
Recorded price range$600.00 - $600.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $600.00 to $600.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Automation Wafer Aligner PN: 002-7391-11

Archived listings

Other Part Numbers & Aliases

002-7391-11Brooks 002-7391-11Brooks Automation 002-7391-11Brooks Automation 002-7391-11 wafer aligner