Wafer Robotics

002-7391-33

Brooks Automation CHE Wafer Pre-Aligner

About this part

Brooks Automation 002-7391-33 is a CHE-configured wafer pre-aligner for semiconductor wafer-handling automation. Multiple exact-part records identify both the part number and CHE model marking. Wafer diameter, axis arrangement, sensor type, controller, connectors, utilities, and compatibility remain configuration-specific and must be verified from the unit label and host-system documentation

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Automation
Part number002-7391-33
Product familyConfiguration-specific
Device typeWafer Aligner
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics

Specifications

Identification
Part number002-7391-33
Manufacturer / brandBrooks Automation
Equipment typeWafer pre-aligner
Observed configuration
Model markingCHE

Configuration and Replacement Boundary

Match the full part number, CHE marking, wafer format, mechanics, sensors, connectors, controller assignment, and host-tool bill of materials. Do not substitute another 002-7391 suffix without a Brooks cross-reference.

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$1,206.13Based on archived listing records
Recorded price range$1,206.13 - $1,206.13Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $1,206.13 to $1,206.13. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Automation 002-7391-33 Wafer Prealigner CHE Working Surplus

Archived listings

Other Part Numbers & Aliases

002-7391-33Brooks 002-7391-33Brooks Automation 002-7391-33Brooks 002-7391-33 CHEBrooks Automation 002-7391-33 wafer prealigner