Wafer Robotics
002-7391-37
Brooks Automation Wafer Aligner
About this part
002-7391-37 is a Brooks Automation wafer-aligner part identifier documented by exact-part auction and industrial-surplus evidence. One exact-part record shows an observed unit marked 24 V and also bearing 002-5271-01, but no verified official exact-part manual, datasheet, or compatibility table is currently available. Electrical revision, wafer size, interfaces, firmware, secondary markings, and host-system compatibility must therefore be verified from the physical unit and Brooks support records
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | 002-7391-37 |
| Manufacturer | Brooks Automation |
| Observed exact-part description | Exact-part auction and industrial-surplus evidence describes 002-7391-37 as a wafer aligner |
| Application domain | Semiconductor wafer-handling automation |
| Configured-unit rule | Electrical revision, wafer size, interfaces, firmware, secondary markings, and installed-system compatibility must be verified from the physical unit and OEM records |
| Verification boundary | Do not infer interchangeability with sibling 002-7391 variants or units carrying similar secondary markings without matching the complete Brooks part number, labels, connectors, and host-system requirement |
Part Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $796.60 to $904.86. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS AUTOMATION 002-7391-37 WAFER ALIGNER