Wafer Robotics
002-7391-38
Brooks Automation Wafer Pre-Aligner
About this part
Brooks Automation 002-7391-38 is a semiconductor wafer pre-aligner used in automated wafer-handling systems to center a wafer and orient its flat or notch before robotic transfer. Exact-part records show CHE-marked units, including an observed copper/Cu configuration. Wafer diameter, controller and cable interface, chuck arrangement, and mechanical interchangeability remain configuration-specific because no manufacturer document naming the -38 identifier was found
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 002-7391-38 |
| Component type | Semiconductor wafer pre-aligner |
| Primary role | Centers a wafer and orients its flat or notch before robotic handling |
Legacy atmospheric pre-aligner manual context
Brooks manual 125516 documents the PRE-050, PRE-200, PRE-201, PRE-300, PRE-301, and PRE-350 atmospheric pre-aligners. It does not identify 002-7391-38, so its numerical and interface details are family reference information rather than specifications for the -38 configuration.
| Topic | Manufacturer-documented family detail | Applicability to 002-7391-38 |
|---|---|---|
| Alignment function | Determines wafer center and fiducial orientation, then positions the wafer for handling | Consistent with the verified pre-aligner identity |
| Optical sensing | 10.7 µm CCD pixel resolution and 0.018° chuck-encoder resolution | Not verified for the exact part |
| Vacuum supply | External vacuum source; recommended supply pressure of -20 to -25 in Hg | Not verified for the exact part |
| Host control | RS-232C ASCII-command interface through the associated controller | Not verified for the exact part |
| Models covered | PRE-050, PRE-200, PRE-201, PRE-300, PRE-301, and PRE-350 | No cross-reference to 002-7391-38 |
Replacement and integration checks
Treat the -38 suffix as configuration-specific; sibling 002-7391 identifiers are not established substitutes.
- Match the complete 002-7391-38 identifier and all unit-label configuration markings.
- Verify wafer diameter and supported flat/notch geometry from the installed system documentation.
- Confirm chuck or lift-pin arrangement, controller revision, cable set, mounting pattern, and host interface before installation.
- Do not infer interchangeability from another 002-7391 suffix or from the legacy PRE-series manual.
Documentation Downloads
Local PDF copiesPart Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $606.30 to $647.09. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 002-7391-38 Wafer Prealigner CHE Copper Cu Untested As-Is
- Brooks Automation 002-7391-38 Wafer Prealigner CHE Untested As-Is