Load Ports

002-7560-023

Brooks Automation Semiconductor Load Port

About this part

Brooks Automation 002-7560-023 is identified as a load port for semiconductor automation. Exact-part evidence establishes the identifier and component class but does not establish carrier size, interface standard, electrical requirements, dimensions, firmware, or installed options. Configuration-dependent details must be verified from the unit nameplate and configuration documentation

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Automation
Part number002-7560-023
Product familyConfiguration-specific
Device typeLoad Port
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryLoad Ports

Specifications

Identification
ManufacturerBrooks Automation
Part number002-7560-023
Component typeSemiconductor load port

Identification and interchange boundary

The similarly numbered Brooks 002-7560-03 is documented independently and is not established as an alias or interchangeable configuration of 002-7560-023.

Exact archive identifier002-7560-023
Similar non-alias identifier002-7560-03 — independently described as a Brooks cassette wafer load port
Interchange ruleDo not transfer 300 mm, cassette, KLA-Tencor integration, or other 002-7560-03 claims to 002-7560-023 without nameplate or manufacturer confirmation.

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$3,500.00Based on archived listing records
Recorded price range$3,500.00 - $3,500.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $3,500.00 to $3,500.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks 002-7560-023 Load Port *used working

Archived listings

Other Part Numbers & Aliases

002-7560-023Brooks 002-7560-023Brooks Automation 002-7560-023