Wafer Robotics
003-1500-02
Brooks Automation MagnaTran 7F Vacuum Wafer Transfer Robot
About this part
Brooks Automation part number 003-1500-02 identifies a MagnaTran 7F (MAG 7 F) robot for transferring wafers within vacuum cluster tools. Equipment records show this robot body both with a Frogleg arm and without an arm, making the arm, end effector, cabling, and application-specific setup configured-unit attributes. Brooks literature specifies the wider MAG 7 F platform rather than this exact part number, so the published performance ratings are retained as family-level specifications
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Exact part number | 003-1500-02 |
| Product family | MagnaTran 7 |
| Observed model designation | MagnaTran 7F (MAG 7 F) |
| Application | Wafer transfer in vacuum cluster tools |
| Arm architecture | Frogleg arm assembly |
| Supported wafer sizes | 100, 125, 150, 200, and 300 mm; size-specific end effectors are available |
| Payload capacity | 1.0 kg (2.2 lb) |
| Axes of motion | The 2008 MAG 7 F brochure specifies three cylindrical-envelope axes: radial (R), rotational (θ), and vertical (Z); the MagnaTran 7.1 manual also documents two-axis MAG 7 F configurations |
| Mounting | Top-mount flange compatible with VacuTran 5, MultiTran 5, and MagnaTran 6 mounting configurations |
| Drive assembly weight | 30 kg (66 lb) |
| Arm assembly weight | 3–7 kg (6–16 lb) |
| Helium leak rate | Less than 1 × 10^-9 standard cm³/s |
| Base operating pressure | 5 × 10^-9 Torr |
| Drive temperature limits | 50 °C maximum operation; mounting flange may be exposed to 120 °C maximum |
| Arm and end-effector temperature limit | 120 °C maximum exposure and operation |
| Input power | 24 VDC, +10%/-0%, at 20 A |
| Serial interfaces | Switch-selectable RS-232/RS-422 control interface, dedicated RS-232 port for the hand-held control module, and one additional RS-232 peripheral port |
| Parallel I/O | 22 inputs and 20 outputs for sensing, interlocks, position correction, or peripheral control |
| Axis repeatability | R: 0.05 mm (3σ); θ: 0.003° (3σ); Z: 0.05 mm (3σ) |
| Placement repeatability | 0.1 mm TIR in the horizontal plane at appropriate speeds |
| Typical wafer exchange time | 5–10 seconds for pick, 180° rotation, and place; dependent on arm extension, substrate size, temperature, and material |
| Published reliability | Greater than 11 million mean cycles between failures (MCBF) |
| Safety and compliance | PASIV programmable access zones; manufacturer brochure states CE and SEMI S2 compliance |
| Optional recovery accessory | PowerPak battery-backup module for recovery following emergency-off or power loss |
Axis and arm configuration
MagnaTran 7F hardware was offered in multiple configurations; the exact part number alone does not establish every installed option.
Documentation Downloads
Local PDF copiesPart Photos
4 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $17,001.00 to $17,001.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 003-1500-02 WITH ARM / VACUUM WAFER TRANSFER ROBOT (MAG 7) WITH ARMS / BROOKS