Wafer Robotics
003-1600-96R
Brooks Automation MagnaTran 7 Vacuum Wafer-Transfer Robot Assembly
About this part
Brooks Automation 003-1600-96R identifies a MagnaTran 7 robot assembly for semiconductor wafer transfer in a vacuum process environment. The 003-1600 number base corresponds to the MagnaTran 7.1 platform documented by Brooks. Arm geometry, axis count, vertical travel, reach, end effectors, wafer size, and application settings are configuration-dependent and are not established for the -96R build by publicly available manufacturer documentation
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part identifier | 003-1600-96R |
| Product family | MagnaTran 7 / MagnaTran 7.1 |
| Equipment type | Vacuum wafer-transfer robot assembly |
| Operating environment | Semiconductor wafer transfer in high- and ultra-high-vacuum process environments |
| Available motion configurations | Two axes (radial and rotational) or three axes (radial, rotational, and vertical), depending on robot and arm configuration |
| Supported wafer sizes | 100, 125, 150, 200, and 300 mm with the corresponding end effector |
| Maximum extension | Up to 1050 mm; arm-set dependent |
| Radial-axis repeatability | ±0.05 mm at 3σ |
| Rotational-axis range and repeatability | Continuous rotation; ±0.003° at 3σ |
| Vertical-axis travel and repeatability | 25 or 35 mm travel on three-axis models; ±0.05 mm at 3σ |
| Placement repeatability | 0.1 mm TIR in the horizontal plane at appropriate speeds |
| Standard arm load capacity | 1.0 kg per end effector in addition to end-effector mass |
| High-capacity arm option | 4.6 kg for Single Frogleg and BiSymmetrik arms |
| Drive input power | 24 VDC ±10%, 20 A, 480 W; actual current consumption is application-dependent |
| Base-vacuum capability | Less than 5 × 10^-9 Torr potential |
| Helium leak rate | Less than 1 × 10^-9 standard cm³/s |
| Drive weight without arms | 21 kg (46.5 lb) for two-axis drive; 29.5 kg (65 lb) for three-axis drive |
| Mounting | Top-mount flange compatible with the Brooks MultiTran 5 / MTR 5 interface |
| Communications and I/O | RS-422/RS-232 control or service interface; dedicated RS-232 CDM port; auxiliary RS-232 peripheral port; discrete wafer-sensor, safety-interlock, and parallel I/O |
| Drive temperature limits | 50°C maximum operating temperature; 80°C maximum drive exposure; 120°C maximum mounting-flange exposure |
| Standard-arm temperature limit | 120°C maximum operating and exposure temperature |
Configuration boundary
The -96R suffix is an application-specific assembly designation that is not decoded in accessible Brooks literature. MagnaTran 7 robots were supplied with multiple arm sets, two- or three-axis drives, different vertical travels, application-specific end effectors, and factory-assigned parameters. The equipment label, Brooks acceptance-test record, quality report, and installation drawing should be used to determine the build-specific configuration before replacement or installation.
Standard MagnaTran 7 model configurations
Brooks documented three standard MagnaTran 7 arm arrangements. This matrix describes the family and does not establish which arrangement is fitted to 003-1600-96R.
| Family model | Standard arm arrangement | Axis options |
|---|---|---|
| MagnaTran 7F | Single Frogleg arm assembly | Two or three axes |
| MagnaTran 7B | BiSymmetrik dual-pan arm set, with arms addressing opposite directions | Two or three axes |
| MagnaTran 7X | Leapfrog same-side dual-arm set, with vertically stacked end effectors | Three axes |
Service and replacement guidance
Brooks continues to identify MagnaTran 7 within its repair and refurbishment coverage and provides a migration path to the MagnaTran LEAP platform.
Retrofit safety notes
A MagnaTran LEAP retrofit requires system-level engineering review even when the mechanical exchange is straightforward.
- Repeat or update the system risk assessment before retrofit; the redundant safety controller available with MagnaTran LEAP was not present on MagnaTran 7 or MagnaTran 8.
- Confirm whether the existing arm set and end effectors are retained or replaced.
- Confirm host-command and software-behavior compatibility before commissioning.
- Electrical adapters may be required between the existing installation and the replacement robot.
- Do not infer retrofit compatibility from the 003-1600 number base alone; Brooks assigns the replacement configuration from the complete existing part number and application details.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $18,000.00 to $18,000.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation Magnatran 7 003-1600-96R Robot assy