Wafer Robotics
003-1605-283
Brooks Automation MagnaTran 7 Vacuum Wafer Transfer Robot
About this part
Brooks Automation part 003-1605-283 identifies a MagnaTran 7 vacuum wafer-transfer robot associated with an OEM-configured TEL assembly. An observed unit also carries reference 601600-343-0002, but that reference is not established as a universal exact alias. MagnaTran 7 robots are top-mounted central vacuum robots; armset, wafer size, axis count, Z travel, and I/O implementation are configuration-dependent and should be confirmed from the unit label and Brooks QR configuration record
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 003-1605-283 |
| Product family | MagnaTran 7 |
| Equipment class | Top-mounted central vacuum wafer-transfer robot |
| Available axis configurations | 2-axis or 3-axis; the exact 003-1605-283 axis configuration is not documented |
| Radial-axis range | Armset-dependent |
| Radial-axis repeatability | ±0.05 mm at 3σ |
| Rotational-axis range | Infinite rotation |
| Rotational-axis repeatability | ±0.003° at 3σ |
| Vertical-axis travel | 25 mm or 35 mm on 3-axis models |
| Vertical-axis repeatability | ±0.05 mm at 3σ on 3-axis models |
| Placement repeatability | 0.1 mm TIR in the horizontal plane at appropriate speeds |
| Drive input power | 24 VDC ±10%, 20 A, 480 W; actual current depends on the application |
| Drive weight without arms | 21 kg (46.5 lb) for 2-axis drive; 29.5 kg (65 lb) for 3-axis drive |
| Mounting | Top-mount flange compatible with the Brooks MultiTran 5/MTR 5 interface |
| Helium leak rate | Less than 1 × 10^-9 standard cm³/s helium |
| Base-vacuum potential | Less than 5 × 10^-9 Torr |
| Drive temperature limits | 50°C maximum operating; 80°C maximum drive exposure; 120°C maximum mounting-flange exposure |
| Host communications | Selectable RS-232 or RS-422 through SIO1 |
| Additional interfaces | Dedicated RS-232 for the handheld CDM, RS-232 peripheral port SIO2, and configuration-dependent discrete MISC I/O |
| Standard arm types | Single Frogleg, BiSymmetrik, and Leapfrog configurations were documented; exact 003-1605-283 armset is undetermined |
| Supported wafer sizes | 100, 125, 150, 200, or 300 mm with the corresponding end effector; exact configured size is undetermined |
| Standard arm payload | 1.0 kg (2.2 lb) in addition to end-effector mass, per end effector |
| High-capacity arm option | 4.6 kg (10.0 lb) for Single Frogleg or BiSymmetrik arms |
| Maximum extension | Up to 1050 mm, dependent on armset |
Configuration-dependent characteristics
MagnaTran 7 was supplied in multiple mechanical and interface configurations. The exact build should be read from the unit label, serial-number record, and Brooks QR certificate rather than inferred from the part-number family.
| Characteristic | Documented MagnaTran 7 choices | 003-1605-283 determination |
|---|---|---|
| Axis count | 2-axis or 3-axis | Not established |
| Armset | Single Frogleg, BiSymmetrik, or Leapfrog variants | Not established |
| Wafer diameter | 100, 125, 150, 200, or 300 mm with size-specific end effector | Not established |
| Z travel | 25 or 35 mm on 3-axis models | Not established |
| Radial reach | Armset-dependent; family limit up to 1050 mm | Not established |
| Discrete I/O | High-side, low-side, relay, or Marathon Express implementations documented | Not established |
| OEM reference | Application-specific customer references may accompany the Brooks identifier | 601600-343-0002 observed on one TEL-associated assembly; not adopted as an exact alias |
Installation and service notes
- The Brooks QR certificate is the permanent manufacturing record for the robot and contains serial number, model, and configuration-critical data needed for service.
- Robots integrated into cluster tools may have system-specific settings and acceptance-test parameters. Consult the applicable cluster-tool manual, controller manual, and wiring drawings before changing configuration or alignment.
- Use an isolated 24 VDC supply and wiring rated for the full documented load. Never connect or disconnect the robot power cable while energized.
- Brooks continues to identify MagnaTran 7 within its supported vacuum-robot repair and refurbishment portfolio.
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $20,000.00 to $20,000.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS AUTOMATION 601600-343-0002 MAGNATRAN 7 RBT WAFER HANDLER TEL 003-1605-283