Load Ports

003-9010-13

Brooks Automation Vacuum Cassette Elevator

About this part

Brooks Automation 003-9010-13 is a Vacuum Cassette Elevator assembly for semiconductor wafer handling. Exact equipment inventories classify it as an elevator, while the stored archive describes a load-lock elevator lift with controls. Cassette format, wafer size, travel, seal and flange arrangement, controls, utilities, and host-tool fit remain configuration-specific

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Automation VCE

Part number003-9010-13

Product familyConfiguration-specific

Device typeVacuum cassette elevator/load-lock elevator

Configuration statusConfiguration varies

Application classWafer automation

CategoryLoad Ports

Specifications

Identification

Part number	003-9010-13
Manufacturer / brand	Brooks Automation

Product

Equipment type

Vacuum cassette elevator / load-lock elevator

Configuration and Installation Boundary

Match the full identifier, cassette and wafer format, travel, vacuum interface, sensors, motor, controller, connectors, and host-tool bill of materials. The presence of controls in one sale does not establish a universal bundled configuration.

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$1,795.56Based on archived listing records

Recorded price range$1,795.56 - $1,795.56Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $1,795.56 to $1,795.56. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

003-9010-13 / LOAD LOCK ELEVATOR LIFT WITH CONTROLS / BROOKS AUTOMATION

Archived listings

Other Part Numbers & Aliases

003-9010-13Brooks 003-9010-13Brooks Automation 003-9010-13Brooks 003-9010-13 vacuum cassette elevator