Load Ports

003-9200-97

Brooks Automation Load-Lock Cassette Elevator

About this part

Brooks Automation 003-9200-97 is identified by an exact archived manufacturer-and-part-number record as a load-lock cassette elevator for semiconductor wafer handling. Brooks describes its VCE class as configurable load-lock equipment for cassette-based wafer transfer. The exact identifier does not establish VCE generation, cassette format, wafer diameter, travel, door style, controls, utilities, or host-tool compatibility

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Automation VCE

Part number003-9200-97

Product familyConfiguration-specific

Device typeLoad-lock vacuum cassette elevator

Configuration statusConfiguration varies

Application classWafer automation

CategoryLoad Ports

Specifications

Identification

Part number	003-9200-97
Manufacturer / brand	Brooks Automation

Product

Equipment type

Load-lock cassette elevator

Configuration and Replacement Boundary

Confirm VCE generation, cassette and wafer format, travel, door and vacuum interface, sensors, drive, connectors, controls, and host-tool bill of materials before installation or substitution.

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$15,000.00Based on archived listing records

Recorded price range$15,000.00 - $15,000.00Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $15,000.00 to $15,000.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks Automation Loadlock Cassette Elevator PN: 003-9200-97

Archived listings

Other Part Numbers & Aliases

003-9200-97Brooks 003-9200-97Brooks Automation 003-9200-97Brooks 003-9200-97 cassette elevator