Load Ports
013077-054-20
Brooks Automation Load Port
About this part
013077-054-20 is a Brooks Automation load-port identifier found in Sonisys auction records and external surplus inventory as a 300 mm wafer load port with FIXLOAD 25 or FIXLOAD V5 wording. Official Brooks Automation pages support the manufacturer and semiconductor interface-automation context, but no verified official exact-part datasheet, service manual, wiring guide, or compatibility matrix is currently available Treat wafer size, FIXLOAD wording, transport/OEM-tool references, carrier interface, mapping/sensing options, controller electronics, and host-tool compatibility as observed configuration context that must be verified from the physical unit label and OEM documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | 013077-054-20 |
| Manufacturer context | Brooks Automation semiconductor automation and interface-automation service context |
| Observed exact-part description | External exact-part inventory and Sonisys listing evidence describe 013077-054-20 as a Brooks load port or wafer load port; this is observed identity context, not an official model-wide specification |
| Observed load-port wording | Exact-part evidence has been observed with 300 mm, FIXLOAD 25, FIXLOAD V5, and Axcelis ES3 transport context; verify these attributes on the physical unit before treating them as interchangeable or universal |
| Configured-unit rule | Wafer size, carrier format, door interface, mapping/sensing options, controller electronics, firmware, harnessing, and OEM tool fit can vary by configured load-port unit |
| Application domain | Carrier interface and automated wafer loading for semiconductor process, inspection, or metrology equipment |
Part Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,851.13 to $4,650.13. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation FIXLOAD V5 Semiconductor Wafer Load Port Part # 013077-054-20
- Brooks Automation 013077-054-20 300mm Wafer Load Port FIXLOAD 25 Working Surplus