Load Ports
013077-079-20
Brooks Automation FIXLOAD 25 V5 300 mm FOUP Load Port
About this part
Brooks Automation 013077-079-20 is a configuration-specific FIXLOAD 25 V5 load port for 300 mm front-opening unified pods. The process-tool-mounted module receives and docks a FOUP, removes its door, and provides wafer-handler access within the tool interface. manufacturer material does not decode the -079-20 configuration, so optional control electronics, factory-automation interfaces, carrier identification, and FixMAP mapping must be confirmed from the unit label or configuration records
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation, Inc |
| Manufacturer part number | 013077-079-20 |
| Product designation | FIXLOAD 25 V5 |
| Equipment class | 300 mm FOUP load port module |
| Carrier configuration | 25-wafer, 300 mm FOUP configuration |
| Load-port operation | Receives a FOUP, docks it to the process equipment, removes the FOUP door, and presents the wafers for handler access |
| Mechanical interface | BOLTS-compatible process-tool interface |
| Wafer-access time | 6 seconds |
| Cleanliness rating | Cleanliness Class 0.01 according to Federal Standard 209E |
| Carrier interoperability | Designed for FOUPs compliant with the applicable SEMI standards |
| Electronic control choices | Basic I/O, CPU control, or DeviceNet; the electronics installed in 013077-079-20 are not publicly decoded |
| Factory-automation interfaces | E84 parallel I/O, parallel interlocking, and a combined interface for E84, carrier identification, and FixMAP were offered by Brooks |
| Compliance statement | Historically described by Brooks as SEMI-compliant, CE-certified, and designed in accordance with I300I guidelines |
Configuration-dependent interfaces and options
Brooks offered several FIXLOAD control and integration options. Their availability at family level does not establish that each option is installed on 013077-079-20.
| Feature | FIXLOAD family offering | Status for 013077-079-20 |
|---|---|---|
| Electronic control | Basic I/O, CPU control, or DeviceNet | Not decoded by the public part number |
| Factory automation | E84 parallel I/O and parallel interlocking | Installation not established |
| Carrier identification | Infrared, RF, or barcode reader/writer integration | Installation not established |
| Wafer mapping | Optional FixMAP carriage | Installation not established |
| Safety and process selection | Safety frame and FEOL/BEOL lockout pin options | Installation not established |
| Mechanical placement | Kinematic couplings for repeatable carrier placement | FIXLOAD family feature |
Optional FixMAP wafer mapping
FixMAP was an optional optical mapping system for the FIXLOAD family. It remained stationary during mapping and communicated through the load port rather than requiring a separate equipment interface.
Integration and replacement boundary
The complete Brooks identifier must be used when selecting a replacement. Other 013077 assemblies and other FIXLOAD 25 or V5 units may carry different electronics, interfaces, carrier-identification hardware, mapping equipment, safety options, or tool-specific mounting details. Applied Materials 0242-30962 should be treated as an observed customer-system cross-reference until confirmed against the installed tool documentation.
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,501.25 to $1,501.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 013077-079-20 300mm Load Port FIXLOAD 25 Working Surplus