Load Ports
013096-052-20
Brooks Automation FixLoad 6M 300 mm FOUP Load Port
About this part
Brooks Automation 013096-052-20 is a configured FixLoad 6M load-port assembly for transferring 300 mm wafers between a front-opening unified pod (FOUP) and semiconductor-processing equipment. exact-part records consistently associate this identifier with the FixLoad 6M family. Configuration-dependent equipment—including integrated wafer mapping and E84 automated-carrier handoff hardware—must be verified from the assembly label and installed components
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Product family | FixLoad 6M |
| Manufacturer part number | 013096-052-20 |
| Component type | Semiconductor wafer-carrier load-port module |
| Wafer diameter | 300 mm (FixLoad 6M family) |
| Carrier format | 300 mm front-opening unified pod (FOUP) |
| Equipment interface | Carrier-to-tool interface for semiconductor wafer-processing equipment |
| Part-number scope | Configured assembly; suffix-specific option content is not defined in publicly indexed manufacturer literature |
Family capabilities and exact-unit boundary
FixLoad 6M family capabilities are configuration dependent; only the 300 mm FOUP load-port identity is established for this exact identifier.
| Capability | Documented scope | 013096-052-20 judgment |
|---|---|---|
| 300 mm FOUP handling | Brooks corporate literature places FixLoad 6M within its 300 mm FOUP load-port offering. | Applicable; exact-part records identify 013096-052-20 as FixLoad 6M. |
| Load-port wafer mapping | Brooks documentation recommends a FixLoad 6M equipped with load-port mapping where detection of double-slotted wafers is required. The documented mapper recognizes present, missing, cross-slotted, and double-slotted wafers. | Optional family configuration; presence on this exact assembly is not established. |
| E84 automated handoff | Brooks EFEM literature describes optional E84 equipment supporting AGV and OHT carrier handoff through the load ports. | System-level option; presence on this exact assembly is not established. |
Brooks controller integration
The Brooks MagnaTran LEAP software manual defines a FIXLOAD linked-device type specifically for a FixLoad 6M Load Port Module. It associates that link with a DNETSGW4 four-port serial gateway, identified as the FixLoad 6M connection for SI30 through SI39. Available link parameters are 9600 or 19200 baud, none/even/odd parity, seven or eight data bits, and one or two stop bits. These are controller-link configuration choices and do not establish the hardware or stored settings of part 013096-052-20.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $3,350.00 to $3,350.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks, Fixload6M LOAD PORT 013096-052-20 Novellus