Wafer Robotics
015-1610-01
Brooks Automation Wafer-Handling End Effector
About this part
Brooks Automation 015-1610-01 is a forked end-effector assembly for semiconductor wafer-handling robotics. Exact-package evidence identifies Brooks Automation as the manufacturer, while independent semiconductor-equipment inventories identify the part as an end effector. available evidence does not establish a compatible robot model, wafer diameter, dimensional envelope, or electrical specification
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Part number | 015-1610-01 |
| Component type | Forked wafer-handling robot end effector |
| Assembly features | Forked substrate-support profile with an attached flat-flex electrical lead and connector |
Marking relationships
Adjacent identifiers visible with the photographed assembly describe associated markings rather than verified aliases for 015-1610-01.
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,000.00 to $1,000.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS SEMITOOL END EFFECTOR 015-1610-01