Wafer Robotics
02-169208-00
Brooks Automation ATM EFEM Wafer-Handling Robot
About this part
Brooks Automation 02-169208-00 is an atmospheric wafer-handling robot assembly used in the equipment front-end module of semiconductor process tools. Documented installations place this identifier in 300 mm Novellus Gamma 2130 photoresist-strip systems. The exact Brooks commercial robot model, arm geometry, end-effector configuration, controller, and electrical requirements are not established by publicly available exact-part documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part number | 02-169208-00 |
| Manufacturer | Brooks Automation |
| Equipment role | EFEM wafer-transfer robot |
| Robot type | Atmospheric top-mount wafer-handling robot |
| Operating environment | Atmospheric side of a semiconductor equipment front-end module |
Configuration and interchangeability
The documented 300 mm Gamma 2130 installations establish an observed application, not a universal specification for every unit carrying 02-169208-00. Do not infer an ATM-300, ATM-400, AXM 400, or other Brooks commercial model solely from wafer size. Replacement matching should verify the robot nameplate, mounting interface, arm and end-effector configuration, vertical travel, controller compatibility, cabling, and customer-specific build information.
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $495.63 to $495.63. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 02-169208-00 ATM Wafer Handling Robot Untested As-Is