Wafer Robotics
1-0000-27
Brooks Automation Z-Bot Wafer-Handling Robot Assembly
About this part
Brooks Automation 1-0000-27, also formatted 001-0000-27, identifies a Z-Bot wafer-handling robot/indexer assembly associated with the GaSonics L3510 plasma asher. Exact-unit records show a three-axis wafer-mover configuration bearing secondary marking 15132-01. The associated 001-1070-02 control/interface PCB is a separate component and is not an alias for the robot assembly
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation, Inc |
| Part number | 1-0000-27; zero-padded form 001-0000-27 |
| Product line | Z-Bot |
| Component type | Wafer-handling robot/indexer assembly |
| Associated process platform | GaSonics L3510 plasma asher |
Identifier and assembly relationships
Secondary markings and related electronics should remain distinct from the robot assembly’s Brooks part number.
| Identifier | Relationship | Treatment |
|---|---|---|
| 1-0000-27 | Supplied short-form identifier | Primary Sonisys record identifier |
| 001-0000-27 | Zero-padded Brooks-format identifier used by multiple exact-part records | Exact alias |
| 15132-01 | Secondary equipment/customer marking observed on a three-axis Z-Bot assembly | Observed configuration only; not an exact Brooks alias |
| 001-1070-02 | Z-Bot control/robot-interface PCB observed with the assembly | Separate component; not an alias |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $6,598.12 to $6,598.12. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 15132-01 / ROBOT, WAFER MOVER, 3 AXIS,1-0000-27 / BROOKS AUTOMATION