107-2-S-CE is the core identifier of the full model designation ATM-107-2-S-CE, a legacy PRI/Equipe atmospheric wafer-handling robot documented by Brooks Automation. The manufacturer configuration matrix identifies ATM-107 as a top-mount robot with a 7.1-inch Z stroke and 7.2-inch arm link. The suffixes specify dual vacuum (-2), a cassette mapper/scanner (-S), and the CE Mark configuration (-CE). The robot uses three-axis T-R-Z motion and operates as part of a system controlled by a Brooks Smart Controller (ESC). End-effector style, wafer diameter, controller version, firmware, and customer-specific suffixes remain unit-dependent
Configurations vary. Verify the exact unit before choosing a replacement.
ManufacturerBrooks Automation / PRI Automation / Equipe
Part number107-2-S-CE
Product familyConfiguration-specific
Device typeMapping Sensor
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics
Specifications
Identification
Full model designation
ATM-107-2-S-CE
Exact configuration
Mounting format
Atmospheric top mount (ATM)
Robot architecture
Single-arm wafer-handling robot
Z-axis stroke
7.1 in (ATM-107 configuration-matrix value)
Arm link
7.2 in (ATM-107 configuration-matrix value)
Vacuum configuration
Dual vacuum (-2 option)
Cassette mapping
Cassette mapper/scanner (-S option)
Compliance designation
CE Mark configuration (-CE); actual compliance is verified by the physical CE mark on the unit
Motion
Axes
Three axes: T (theta/rotation), R (radial reach/retract), and Z (vertical)
Atmospheric Single-Arm Robot family
Repeatability
±25 µm at 3 sigma
Supported wafer-size range
75 to 300 mm (3 to 12 in); the installed end effector and host-tool configuration determine the unit's actual wafer size
Cleanroom rating
Class 1
Environmental — family
Operating temperature
15 to 32.5 °C (59 to 89 °F)
Storage temperature
-20 to 40 °C (-4 to 104 °F)
Relative humidity
10% to 80%, non-condensing
Maximum operating altitude
1,000 m above sea level
Facilities — family
Recommended vacuum source
25 in Hg at greater than 1 SCFM free flow
Controller system — family
Controller architecture
Brooks Smart Controller (ESC) provides servo control, power, diagnostics, and scanner control
Host interface
RS-232C through a DB25 connector; documented default rate 9,600 bit/s
Controller AC supply
100/120 VAC at 5 A or 220/240 VAC at 2.5 A; documented tolerance 92–260 VAC, 47–63 Hz
Installation — family
Top-mount fastening
Four user-supplied 1/4-20 UNC or M6 cap screws
Recommended mounting-plate thickness
At least 12.5 mm (0.5 in) aluminum or 9.6 mm (0.38 in) steel
Model-code interpretation
The Brooks configuration matrix permits the exact identifier to be decoded without importing specifications from sibling models.
Segment
Manufacturer-defined meaning
Application to this record
ATM
Atmospheric top mount
Defines the robot's mounting orientation and atmospheric operating format.
107
ATM/ABM matrix position with 7.1-inch Z stroke and 7.2-inch arm link
Defines the ATM-107 mechanical base configuration.
2
Dual vacuum
Identifies the dual-vacuum option; it does not by itself establish a dual arm or a particular fork.
S
Cassette mapper/scanner
Identifies the optional scanner used to detect wafer presence, absence, and cross-slotting in a cassette.
CE
CE Mark configuration
The manual directs users to verify actual compliance by checking for the physical CE mark on the product.
Configuration boundaries
Several characteristics are selected for the host tool or customer build and must not be generalized from individual installed systems.
S293 is an observed customer/platform suffix and is not an exact alias for 107-2-S-CE.
Observed 200 mm and 8-to-12-inch installations establish compatible configured uses, not one fixed wafer-size specification for every ATM-107-2-S-CE.
End-effector or fork style, controller part number, firmware, cables, and host-tool compatibility should be confirmed from the robot label, Brooks Quality Report, parameter files, and system documentation.
The manufacturer manual states that its drawings are generic; a build-specific dimensional drawing is required for exact clearances and mounting geometry.
Part Photos
4 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$1,875.00Based on archived listing records
Recorded price range$750.00 - $3,000.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $975.00 to $2,775.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
PRI Automation EQUIPE ATM 107-2-S-CE Wafer Handling Robot Brooks Automation
