Vacuum and Cryogenics

320FE

CTI-Cryogenics / Brooks Automation Cryogenic Vacuum-System Component

About this part

320FE is an exact identifier associated with the CTI-Cryogenics cryogenic vacuum equipment. It is classified here as a cryogenic vacuum-system component. Pump size, flange, cold head, power, controls, compressor compatibility, and service revision must be verified from the complete assembly label

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerCTI-Cryogenics cryogenic vacuum equipment
Part number320FE
Product familyConfiguration-specific
Device typeCryogenic vacuum-system component
Configuration statusConfiguration varies
Application classVacuum and cryogenic systems
CategoryVacuum and Cryogenics

Specifications

Identification
Manufacturer or brand familyCTI-Cryogenics / Brooks Automation
Exact archived identifier320FE
Product familyCTI-Cryogenics cryogenic vacuum equipment
Equipment typeCryogenic vacuum-system component
Function
Documented or observed roleProvides a model-specific control, interface, pumping, or mechanical function within a CTI-Cryogenics vacuum system
Configuration
Unit-specific boundaryPump size, flange, cold head, power, controls, compressor compatibility, and service revision must be verified from the complete assembly label
System
TechnologyClosed-cycle helium refrigeration for cryogenic vacuum pumping
Compatibility
System matchingUse the model-specific CTI/Edwards manual and complete assembly number before substitution

Configuration and Replacement Boundary

Use the complete 320FE marking together with the unit nameplate, revision, calibrated range, electrical interface, mechanical connections, and host-equipment documentation. A family resemblance or partial code match does not establish interchangeability.

Archived Unit Context

These statements preserve what sellers recorded for individual units without turning listing text into family-wide specifications.

Documentation Downloads

Local PDF copies

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records3Tracked historical listing records
Historical median price$9,999.00Based on archived listing records
Recorded price range$1.00 - $12,000.00Low to high recorded listing price
Local documents1PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $2,000.60 to $11,599.80. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks 8185169G001R On-Board IS 320FE Cyropump 200-230VAC 3A 50/60 Hz - NEW

Archived listings

Other Part Numbers & Aliases

320FECTI-Cryogenics 320FE