Flow Control
5850D
Brooks Instrument 5850 Series Thermal Mass Flow Controller
About this part
5850D is a Brooks Instrument 5850 Series thermal mass flow controller identifier found in historical auction and surplus records. available evidence identifies 5850D units as configured gas MFCs with examples including 0-300 SCCM nitrogen, 0-5 SLPM helium, 5 SLPM hydrogen, 0-50 SCCM nitrogen, 20 SCCM argon, and 50 SCCM configurations. No verified exact official downloadable Brooks 5850D PDF is currently available, so Sonisys separates exact observed 5850D auction evidence from broader Brooks 5800E/5850E analog-platform documentation
Unit-specific configuration
Observed configuration
Historical listing records identify this part as Hydrogen at 5 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part number5850D
Product family5850 Series
Device typeMass Flow Controller
Observed gasHydrogen
Observed full-scale range5 SLPM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Part identifier | 5850D |
| Device type | Thermal mass flow controller for gas flow measurement and control |
| Observed series naming | Stored and auction titles identify 5850D as a Brooks 5850 Series or 5800 Series mass flow controller |
| Document boundary | No exact official downloadable Brooks 5850D manual or data sheet was found; hosted Brooks documents are 5800E/5850E family context, not a claimed 5850D-specific manual |
Function
| Control function | Mass flow controller units combine a thermal mass flow sensor, control valve, and electronic control system to regulate gas flow |
Applications
| Application domain | Gas handling in semiconductor, laboratory, analytical, fuel-cell, chemical, petrochemical research, and process applications |
Observed variants
| Stored auction gas/range combinations | 5 SLPM (10 stored records) and 300 SCCM (4 stored records) |
| Stored auction gas examples | Stored title examples include 0-300 SCCM nitrogen, 0-5 SLPM helium, and 5 SLPM hydrogen |
| External gas/range examples | Listing records also show 0-50 SCCM nitrogen, 20 SCCM argon, and 50 SCCM configurations for Brooks 5850D units |
Configuration
| Configured-unit rule | Gas calibration, full-scale flow, valve state, connector style, fitting package, seal material, and calibration orientation vary by the configured unit and should be verified from the nameplate and calibration paperwork |
Family context
| Related Brooks 5800E platform | Brooks 5800E documentation covers elastomer-sealed analog thermal mass flow meters and controllers including 5850E, 5851E, 5853E, 5860E, 5861E, and 5863E models |
| 5800E flow range context | Brooks 5800E data sheet lists wide model-dependent ranges from low sccm service through slpm service; exact 5850D range is unit-specific |
| 5850E standard range context | The official 5850E manual lists standard ranges from 3 sccm to 30 slpm nitrogen equivalent for the later 5850E analog controller |
| 5850E accuracy context | The official 5850E manual lists +/-1% full scale including linearity at calibration conditions, and +/-1.5% full scale for flow ranges above 20 slpm |
| 5850E repeatability context | The official 5850E manual lists repeatability of 0.25% of rate |
| 5850E response context | The official 5850E manual lists less than 3 seconds response to within 2% full scale final value for a 0 to 100% command step |
| 5850E operating pressure context | The official 5850E manual lists 1500 psi maximum working pressure, with required differential pressure depending on gas and range |
| 5850E temperature context | The official 5850E manual lists 40 F to 150 F / 5 C to 65 C operating ambient temperature limits |
| 5850E analog command input | The official 5850E manual lists 0-5 Vdc command input with 200 kOhm input resistance |
| 5850E flow output | The official 5850E manual lists 0-5 Vdc output into a 2000 ohm or greater load |
| 5850E electrical connections | The official 5850E manual documents card-edge and 15-pin D-connector versions |
| 5850E power requirements | The official 5850E manual lists +/-15 Vdc supply requirements, with current draw depending on normally closed or normally open valve configuration |
| 5850E control range | The official 5850E manual lists 50:1 control range |
| 5850E leak integrity | The official 5850E manual lists leak integrity of 1 x 10^-9 atm cc/sec helium |
| 5850E process connections | The official 5850E manual lists 1/4 inch compression fittings for flow rates up to 10 slpm and 3/8 inch compression fittings for higher flow rates, with optional VCO and VCR connections |
| Control-valve caution | Brooks 5850E documentation identifies the control valve as a precision control element rather than a positive shutoff valve |
Compatibility
| Interchangeability caution | Do not assume a 5850D can replace a 5850E, 5850S, 5850i, 5850EM, or another configured Brooks MFC without checking calibration, connector, power, fittings, valve state, gas compatibility, and system requirements |
Condition
| Stored condition context | Stored auction records are mostly used units, with one listing |
Documentation Downloads
Local PDF copiesPart Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records14Tracked historical listing records
Historical median price$136.98Based on archived listing records
Recorded price range$44.00 - $363.11Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $49.00 to $350.03. Based on 14 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks 5850 Series Flow Controller Model 5850D 0-300 SCCM Nitrogen
- Brooks 5850 Series Flow Controller Model 5850D 0-5 SLPM Helium
- Brooks 5850D Mass Flow Controller 5850 Series 5 SLPM Hydrogen
- BROOKS 5850D MASS FLOW CONTROLLER, 5800 SERIES, 5 SLPM RANGE, NIB
- Brooks 5850D Mass w Controller 5850 Series 5 SLPM Hydrogen
Archived listings
Other Part Numbers & Aliases
5850D5850-DBrooks 5850DBrooks Instrument 5850DBrooks 5850-DBrooks Model 5850DBrooks 5850D MFCBrooks 5850D Mass Flow ControllerBrooks 5850 Series 5850D