Brooks Instrument TR Series Thermal Mass Flow Controller
About this part
5850TR is a Brooks Instrument TR Series elastomer-sealed thermal mass flow controller for gas mass-flow measurement and control. Brooks official legacy documentation describes the 5850TR as a mass flowmeter / mass flow controller used widely in semiconductor and other controlled gas-handling applications, with a flow sensor, control valve, and integrated electronics. The model is configurable by gas, range, pressure rating, valve type, I/O, fitting, power supply, and seal materials, so stored auction gas/range observations should be treated as configured-unit evidence rather than universal model specifications
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 1 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed thermal mass flow controller / mass flowmeter-controller platform
Series family
Brooks Model 5850TR / TR Series MFC
Official legacy status
Brooks legacy products page lists Model 5850TR under elastomer-sealed thermal mass flow controllers and provides separate 15 VDC and 24 VDC installation manuals
Function
Control architecture
Brooks 5850TR documentation describes the controller as consisting of a flow sensor, control valve, and integrated electronic control system to produce stable gas flow
Applications
Application domain
Semiconductor gas handling, OEM analytical/environmental equipment, and other manual, electronic, or computer-controlled gas flow applications
Configuration
Configured-unit rule
Gas, full-scale flow, valve type, operating pressure, I/O type, connector, fitting, cable, power supply, approval, and seal material vary by full model code and label
Performance
Accuracy
Brooks 5850TR manuals list 1% full scale including linearity measured at calibrated conditions
Repeatability
Brooks 5850TR manuals list 0.25% full scale repeatability
Rangeability
Brooks 5850TR manuals list 50:1 rangeability
Temperature coefficient
Brooks 5850TR manuals list 0.1% full scale per C temperature coefficient
Flow
N2-equivalent flow range
Brooks 5850TR manuals list any full-scale range from 10 mln/min to 20 ln/min based on nitrogen equivalent
Electrical
Analog flow output and setpoint
Brooks 5850TR documentation lists 0-5 VDC flow output/setpoint input; 24 VDC documentation also lists current I/O options depending on model code
Power supply versions
Official manuals cover +/-15 VDC and +24 VDC configurations; the 24 VDC manual also documents +15 VDC-only as a model-code power option
Electrical connection
Depending on model code, 5850TR units can use Sub-D-type connector or card-edge electrical connection
Controls
Setpoint and valve override
Manuals describe external command/setpoint operation and valve override to fully open or close the control valve independent of command setting
Pressure
Operating pressure versions
15 VDC manual lists 100/300 bar versions; 24 VDC manual model-code section distinguishes 100 bar normally open/normally closed versions and 300 bar normally closed configurations
Environmental
Ambient/gas temperature
Brooks 5850TR manuals list ambient/gas temperature range of 0 C to 65 C
Leak integrity
External leak integrity
Brooks 5850TR manuals list outboard helium leak integrity of 1 x 10^-6 mbar l/s
Materials
Wetted materials
Brooks 5850TR manuals list stainless steel wetted parts with Viton, PTFE, Buna-N, or Kalrez depending on configuration
Mechanical
Mechanical connections
Documented connection options include 1/4 VCR, 1/4 VCO, 1/4 NPT, 1/8 or 1/4 tube compression, 9/16-18 UNF, 6 mm tube compression, and 1/4 Rc/BSPT depending on configuration
Observed variants
Stored auction gas/range combinations
N2 1 SLM, HCl/HCI 100 SCCM as title-spelled, Ar 25 SCCM, N2 500 SCCM, Air 0-50 mln/min, 160 SCCM, SiH4 0-300 mln/min, H2 20 mln/min, and other configured-unit listings appear in stored auction evidence
