Sonisys Industrial Part Archive

Flow Control

5851E

Brooks Instrument Mass Flow Controller

About this part

5851E is a Brooks Instrument elastomer-sealed analog thermal mass flow controller for gas flow measurement and control. The official Brooks 5851E manual identifies the instrument as a mass flow controller built from a flow sensor, control valve, and integral electronic control system, with standard nitrogen-equivalent full-scale ranges from 10 to 100 slpm and hydrogen configurations up to 200 slpm. Exact gas, full-scale flow, connector, fitting, valve behavior, and seal materials still depend on the configured unit code and physical label

Unit-specific configuration
Observed configuration

Historical listing records identify this part as AIR. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

SpecificationsDocuments (2)Photos (18)Listing history
Brooks 5851E 5800E / 5850E Series auction imageArchived part photo ยท View gallery

Key Facts

ManufacturerBrooks Instrument
Part number5851E
Product familyConfiguration-specific
Device typeMass Flow Controller
Observed gasAIR
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeThermal mass flow controller
Model familyBrooks Model 5851E
Configuration
Functional architectureFlow sensor, control valve, and integral electronic control system
Configured-unit ruleGas, full-scale range, fittings, valve state, connector, and seal package vary by configured model code and should be verified from the unit label
Flow
Standard flow rangeAny full-scale flowrate from 10 slpm to 100 slpm nitrogen equivalent
Performance
Hydrogen flow rangeHydrogen configurations up to 200 slpm
Accuracy+/-1% full scale including linearity at calibration conditions
Repeatability0.25% of rate
Pressure
Response timeLess than 3 seconds to within 2% of full-scale final value for a 0 to 100% command step
Maximum working pressure1500 psi (10.342 MPa)
Differential pressure10 to 50 psi; minimum pressure drop depends on gas and range
Environmental
Control range50:1
Operating temperature5800E data-sheet ambient/gas temperature range is 5 C to 65 C
Non-operating temperature-25 C to +100 C
Electrical
Power requirements+15 Vdc +/-5% at 350 mA and -15 Vdc +/-5% at 350 mA
Power consumption10.5 watts
Command input0-5 Vdc command input with 200 k ohm input resistance
Flow output0-5 Vdc into 1000 ohms or greater, 3 mV maximum ripple
5 volt reference output5 V +/-0.2%, maximum load 1 k ohm
Connector options20-terminal card-edge connector or 15-pin DA-15P D-connector
Integrity
Leak integrity1 x 10^-9 atm scc/sec helium
Controls
Control featuresFast response control, soft start, valve override, low-command valve inhibit, valve off, valve test point, and optional remote transducer input
Applications
Application domainSemiconductor, laboratory, analytical, and process gas handling
Observed variants
Stored auction gas/range combinationsAIR (3), 100 SLM (2), N2 50 SLM (1), CH4 50 SLM (1), 200 SLM (1), HYDROGEN 50 SLM (1), N2 100 SLM (1)

Documentation Downloads

Local PDF copies
Brooks 5800E Series Data Sheet Local PDF download
PDF698 KB
 Brooks 5851E Installation and Operation Manual Local PDF download
PDF5.7 MB

Part Photos

18 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records16Tracked historical listing records
Historical median price$250.00Based on archived listing records
Recorded price range$160.00 - $1,998.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $176.82 to $1,299.00. Based on 16 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument 5851E Mass Flow Controller 100 slpm N2 Gas
  • Brooks 5851E Mass Flow Controller MFC, GAS: Hydrogen FS Flow Rate: 50SLPM
  • Brooks 5851E *USED* Mass Flow Controller 3.5 SCFM AIR
  • Brooks 5851E Mass Flow Controller, 100 SLPM, Oxygen, MOD: 5851E - SERVICE
  • 5851E BROOKS INST. MASS FLOW METER
  • BROOKS 5851E Mass Flow Controller NITROGEN, Brand New

Archived listings

Other Part Numbers & Aliases

5851EBrooks 5851EBrooks Instrument 5851EModel 5851E5851E Mass Flow Controller5851E MFC