Flow Control

5851IA1BS2H2DEA

Brooks Instrument 5851i Mass Flow Controller

About this part

5851IA1BS2H2DEA is a configured Brooks Instrument 5851i mass flow controller identifier. Official Brooks 5851i documentation describes the Model 5851i as a gas mass flow controller for accurately measuring and rapidly controlling gas flow with a flow sensor, control valve, and integral electronic control system. Stored Sonisys auction records and listing records references repeatedly identify the exact configured code as a Brooks Instrument mass flow controller associated with seller reference T258188; no verified gas or full-scale flow value is currently available in the available title evidence

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part number5851IA1BS2H2DEA
Product familyConfiguration-specific
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeConfigured 5851i thermal mass flow controller
Series / modelBrooks Model 5851i mass flow controller
Configured part number5851IA1BS2H2DEA
Function
Control functionThermal mass flow measurement with precision control-valve regulation for gases
Configuration
Observed listing contextStored and listing evidence identifies the exact configured code as a Brooks Instrument mass flow controller associated with reference T258188; no gas or full-scale flow range is visible in the available title evidence
Configured-unit ruleGas, full-scale range, pressure drop, fittings, seal package, valve behavior, connector wiring, and calibration are unit-specific and must be read from the physical label and calibration records
Flow
5851i standard range contextBrooks 5851i documentation lists any full-scale flow rate from 10 slpm to 100 slpm nitrogen equivalent, with up to 200 slpm hydrogen
Performance
Accuracy+/-1% full scale including linearity at calibration conditions
Repeatability0.25% of rate
Response timeLess than 6 seconds response to within 2% of full-scale final value for a 0 to 100% command step
Control range50:1
Limits
Working pressure1500 psi / 10.342 MPa maximum
Differential pressure10 to 50 psi, with higher differential pressures possible depending on gas and range
Operating temperature5 C to 65 C / 40 F to 150 F
Electrical
Power requirement+22.5 to 28 Vdc, 370 mA at +28 Vdc
Output signal0-5 Vdc into 2000 ohms or greater; jumper-selectable 4-20 mAdc or 0-20 mAdc output
Command inputJumper-selectable 0-5 Vdc input or 4-20 mAdc input
Connector15-pin DA-15P D-type connector
Connections
Standard gas connections3/8 inch compression fittings; optional VCO and VCR connections are documented
Controls
Standard featuresBrooks 5851i documentation describes fast response control, soft start, valve override, external setpoint command, low-command valve inhibit, removable cleanable sensor, and output limiting
Installation
Recommended upstream filtrationBrooks 5851i documentation recommends an upstream in-line filter, with 15 micron filtering for 10 to 30 slpm and 30 micron filtering above 30 slpm
Applications
Application domainManual, electronic, or computer-controlled gas handling in process, laboratory, analytical, semiconductor, and related industrial systems

Documentation Downloads

Local PDF copies

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records5Tracked historical listing records
Historical median price$1,138.81Based on archived listing records
Recorded price range$1,138.81 - $1,138.81Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $1,138.81 to $1,138.81. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • BROOKS INSTRUMENT 5851IA1BS2H2DEA MASS FLOW CONTROLLER T258188

Archived listings

Other Part Numbers & Aliases

5851IA1BS2H2DEABrooks 5851IA1BS2H2DEABrooks Instrument 5851IA1BS2H2DEABROOKS INSTRUMENT 5851IA1BS2H2DEA MASS FLOW CONTROLLER T258188