Brooks Instrument 5800E Series Elastomer-Sealed Analog Mass Flow Meter
About this part
5860E is a Brooks Instrument 5800E Series elastomer-sealed analog gas mass flow meter. Official Brooks documentation describes the Model 5860E as a thermal mass flow meter that produces a linear 0 to 5 Vdc output proportional to gas mass flow. Exact gas, full-scale range, fittings, connector style, calibration, and wetted elastomers vary by configured model code and should be verified from the unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 50 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed analog thermal mass flow meter
Series family
Brooks 5800E Series elastomer-sealed, analog, general-purpose gas mass flow controllers and meters
Model family
Brooks Model 5860E mass flow meter; paired in Brooks 5800E documentation with the 5850E low-flow controller model
Flow
Measuring principle
Thermal mass flow sensing with a heated sensor tube and upstream/downstream temperature sensors; the electronics generate a linear 0 to 5 Vdc signal proportional to gas mass flow
5860E N2-equivalent flow range
5800E data sheet lists the 5860 mass flow meter row at 0.003 slpm minimum full scale to 30 slpm maximum full scale, N2 equivalent
Performance
Flow accuracy
5800E data sheet lists flow accuracy as 1% full scale, including linearity at calibration conditions
Repeatability and reproducibility
5800E data sheet lists 0.25% of rate
Zero stability
5800E data sheet lists less than +/-0.2% full scale per year
Pressure
5860E pressure rating
5800E data sheet lists 1500 psi / 100 bar standard pressure rating for the 5850/5860 model row
Environmental
Operating temperature
5800E data sheet lists 5 C to 65 C operating temperature range
Leak integrity
External leak integrity
5800E data sheet lists 1 x 10^-9 atm cc/sec helium external leak integrity
Materials
Primary wetted materials
5800E data sheet lists 316L stainless steel, high alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, and Teflon
Electrical
Electrical connection
5800E data sheet lists 15-pin male Sub-D DA-15P for 5860E/5861E/5863E mass flow meter models
Output signal
5800E data sheet lists 0 to 5 Vdc output into a 2000 ohm or greater load
Reference output
5800E data sheet lists 5 Vdc +/-0.01 Vdc reference output with 2 kOhm maximum load
Power requirement
5800E data sheet lists 1.05 watts for the 5860E/5861E/5863E mass flow meter column, with +15 Vdc at 35 mA and -15 Vdc at 35 mA
Installation
Minimum electrical connections
5860E installation manual identifies chassis ground, 0-5 V signal common, 0-5 V signal output, +15 Vdc supply, and -15 Vdc supply as minimum connections for new installations
Configuration
Configured-unit rule
Gas, full-scale flow range, process fittings, seal material, calibration, and installed system compatibility vary by configured model code and physical nameplate
Applications
Application domain
Gas mass-flow measurement for chemical and petrochemical research, laboratory, analytical, fuel cell, life science, semiconductor, and general gas-handling applications
