5863I is a Brooks Instrument 5800-series high-flow thermal mass flow meter family identifier found in stored Sonisys auction records. Official Brooks 5853/5863 documentation covers the 5863 mass flow meter platform, while stored auction records also include seller wording for configured 5863i units with 300 SLPM air and 80 SLPM air contexts. Exact gas, range, fittings, output option, pressure rating, and calibration details must be verified from the physical unit label and calibration paperwork
Unit-specific configuration
Observed configuration
Historical listing records identify this part as Air at 300 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Thermal mass flow meter for gases
Model family
Brooks Instrument Model 5863 / 5863i Series
Part identifier
5863I / 5863i
Official manual boundary
Brooks 5853/5863 family documentation covers the high-flow 5800-series controller/meter platform; exact 5863i configuration must be checked from the unit label
Function
Primary function
Measures gas mass flow and provides an electrical flow output signal
Internal measurement architecture
Thermal mass-flow measurement with integral electronics, configured by model code and calibration
Flow
High-flow family context
5863-family listings and Brooks 5800-series context place this model in high-flow gas mass-flow service; exact full-scale range is configuration-specific
Observed variants
Stored auction gas/range combinations
Stored Sonisys titles include 300 SLPM air and 80 SLPM air configured-unit contexts
Calibration
Configured-unit rule
Gas calibration, full-scale range, output option, fittings, pressure rating, connector wiring, and customer-specific suffixes vary by configured model code
Electrical
Output context
Brooks 5800-series thermal mass flow meters commonly provide analog flow output; exact voltage/current option must be verified from the label and wiring documentation
Mechanical
Connection context
Process connection size and style are configuration-specific and should be verified from the unit and Brooks documentation
Applications
Application domain
High-flow gas mass-flow measurement in semiconductor, process, laboratory, and industrial gas systems
Compatibility
Verification boundary
Do not assume interchangeability with 5853 controllers, 5860i meters, SLA-series meters, or another configured Brooks unit without checking gas, range, fittings, output, wiring, and pressure rating
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records6Tracked historical listing records
Historical median price$1,600.00Based on archived listing records
Recorded price range$332.50 - $1,650.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $641.25 to $1,650.00. Based on 6 archived listing records; not a current offer, appraisal, or confirmed sale price.
