Flow Control

5866RB1A1G4M2NA

Brooks Instrument 5866RT Pressure Controller/Flowmeter

About this part

5866RB1A1G4M2NA is a configured Brooks Instrument 5866RT-family pressure controller/flowmeter identifier observed in stored auction records. The 5866RT platform controls upstream or downstream pressure from a remote pressure transducer signal while also measuring mass flow through the control valve. Exact gas, full-scale flow, seal package, valve behavior, pressure-transducer range, fitting package, and calibration details must be verified from the complete model code and physical label

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Documents (2)Photos (15)Listing history

Brooks 5866RB1A1G4M2NA Brooks-family industrial component auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Instrument

Part number5866RB1A1G4M2NA

Product familyConfiguration-specific

Device typeFlowmeter

Configuration statusConfiguration varies

Application classVacuum and cryogenic systems

CategoryFlow Control

Specifications

Identification

Device type	Remote-transducer electronic pressure controller/flowmeter
Series family	Brooks Model 5866RT pressure controller/flowmeter
Seal platform	5866RT family supports elastomer-sealed and metal-sealed configurations

Function

Pressure-control function	Maintains a desired upstream or downstream pressure by comparing a remote pressure transducer signal to the setpoint and modulating the integral control valve
Flow-measurement function	Measures mass flow through the control valve and provides a 0-5 V signal proportional to mass flow
Mass-flow-controller mode	5866RT can be configured as a mass flow controller for calibration or test purposes

Pressure

Control architecture	Remote pressure sensor input with adjustable integral PID control electronics and top-access tuning switches
Pressure-control range	100:1 when used with a remote transducer that has a 0-10 V output
Pressure response time	Less than 0.8 seconds typical for a 0-100% command step with less than 2% pressure overshoot; actual response depends on system design
Remote pressure sensor compatibility	Suitable for pressure sensors with 0-5 V or 0-10 V output signals

Flow

Flow range	Any range from 0-3 sccm to 0-30,000 sccm nitrogen equivalent at standard SEMI reference conditions
Flow output signal	0-5 Vdc, 1 kOhm maximum load
Flow accuracy	+/-1.0% full scale including linearity at calibration conditions for 3-10,000 sccm nitrogen equivalent; +/-1.5% full scale for flow rates greater than 20 slpm
Flow repeatability	+/-0.25% of rate
Flow temperature coefficient	0.1% full scale per degree C

Controls

Pressure setpoint signal	0-5 Vdc or 0-10 Vdc command, with 5 Vdc reference output available for setpoint generation
Input/output offset	0.2% full scale
Valve override	Electrically activated valve override is part of the 5866RT control platform

Electrical

Electrical connector	15-pin D-connector, DA-15P
Power requirement, normally closed valve	3.5 W; +15 Vdc +/-5% at 35 mA and -15 Vdc +/-5% at 180 mA
Power requirement, normally open valve	10.5 W; +/-15 Vdc +/-5% at 350 mA

Ratings

Operating temperature range	32 to 150 degrees F (0 to 65 degrees C)
Pressure Equipment Directive context	Brooks data sheet lists PED 97/23/EC Sound Engineering Practice

Materials

Wetted parts	Standard wetted parts are 316L and 316L VAR stainless steel
Valve seat options	Standard Viton fluoroelastomer or metal valve seat depending on configured model code
Seal options	External and internal seals can be fluoroelastomer or metal, with Buna-N, Teflon, or Kalrez options depending on configuration
Leak integrity	Elastomer seal: 1 x 10^-9 atm cc/sec helium maximum; metal seal: 1 x 10^-10 atm scc/sec helium maximum

Connections

Standard mechanical connections	1/8 in or 1/4 in stainless steel compression fittings on standard 5866RT configurations
Optional mechanical connections	1/4 in VCO or VCR options; 5866RT(M) metal-sealed configuration uses 1/4 in VCR

Installation

Mounting orientation	May be installed in any position
Filter recommendation	Brooks recommends an upstream in-line filter, such as Model 5848 for elastomer 5866RT installations, to help prevent foreign material from entering the meter

Applications

Application domain

Upstream or downstream gas pressure control with simultaneous flow measurement, including vacuum-chamber pressure regulation, inert-gas feed control, process vessel pressure control, and flow-related calibration or test service

Documentation Downloads

Local PDF copies

Brooks 5866RT Series Data Sheet Local PDF download

PDF594 KB

Brooks 5866RT Installation and Operation Manual Local PDF download

PDF1.6 MB

Part Photos

15 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records5Tracked historical listing records

Historical median price$359.00Based on archived listing records

Recorded price range$175.00 - $945.00Low to high recorded listing price

Local documents2PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $195.00 to $779.00. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks 5866 RT Series Pressure Controller - Untested (For Parts or Repair)
BROOKS Pressure Controller 5866RB1A1G4M2NA Mass Flow Controller HE 300 SCCM RT
BROOKS PRESSURE CONTROLLER 5866RT He 300SCCM MOD: 5866RB1A1G4M2NA
DUTY FREE 5866RB1A1G4M2NA H2 300SCCM Brooks Gas Mass Flow Meter
Brooks 5866RB1A1G4M2NA 5866 RT-Series Pressure Controller He Gas 300-SCCM

Archived listings

Other Part Numbers & Aliases

5866RB1A1G4M2NABrooks 5866RB1A1G4M2NABrooks Instrument 5866RB1A1G4M2NAModel 5866RB1A1G4M2NABrooks Model 5866RB1A1G4M2NA5866RT 5866RB1A1G4M2NA5866RB1A1G4M2NA Pressure Controller