Flow Control
5866RT
Brooks Instrument Pressure Controller/Flowmeter
About this part
The Brooks Instrument 5866RT is a remote-transducer electronic pressure controller/flowmeter. Official Brooks documentation identifies Model 5866RT as a pressure controller that controls upstream or downstream pressure while simultaneously measuring mass flow through the control valve. Gas, full-scale flow range, pressure-transducer range, seal package, valve behavior, and fitting configuration remain unit-specific and should be verified from the physical label or build records
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part number5866RT
Product familyConfiguration-specific
Device typeFlowmeter
Configuration statusConfiguration varies
Application classVacuum and cryogenic systems
CategoryFlow Control
Specifications
Identification
| Model | 5866RT |
| Device type | Remote-transducer electronic pressure controller/flowmeter |
| Seal platform | Elastomer- or metal-sealed configurations |
Function
| Pressure-control function | Controls upstream or downstream pressure by comparing a remote pressure-transducer signal to the setpoint and modulating the integral control valve |
| Flow-measurement function | Measures mass flow through the control valve and provides a 0-5 Vdc signal proportional to mass flow |
| Mass-flow-controller mode | Can be configured as a mass flow controller for calibration or test purposes |
Pressure
| Control architecture | Remote pressure sensor input with adjustable integral PID control electronics and control-valve modulation |
| Remote pressure sensor compatibility | Suitable for pressure sensors with 0-5 Vdc or 0-10 Vdc output signals |
| Pressure-control range | 100:1 when used with a remote transducer that has a 0-10 Vdc output |
| Pressure response time | Less than 0.8 seconds typical for a 0-100% command step with less than 2% pressure overshoot; actual response depends on system design |
Flow
| Flow range | Any range from 0-3 sccm to 0-30,000 sccm nitrogen equivalent at SEMI standard reference conditions, depending on configuration |
| Flow output signal | 0-5 Vdc, 1 kOhm maximum load |
| Flow accuracy | +/-1.0% full scale including linearity at calibration conditions for 3-10,000 sccm nitrogen equivalent; +/-1.5% full scale for flow rates greater than 20 slpm |
| Flow repeatability | +/-0.25% of rate |
Controls
| Pressure setpoint signal | 0-5 Vdc or 0-10 Vdc command, with 5 Vdc reference output available for setpoint generation |
| Valve override | Electrically activated valve override |
Electrical
| Electrical connector | 15-pin D-connector, DA-15P |
| Power requirement, normally closed valve | 3.5 W; +15 Vdc +/-5% at 35 mA and -15 Vdc +/-5% at 180 mA |
| Power requirement, normally open valve | 10.5 W; +/-15 Vdc +/-5% at 350 mA |
Ratings
| Operating temperature range | 32 to 150 degrees F (0 to 65 degrees C) |
| Maximum pressure | 1500 psi listed on the Brooks pressure-control product category page |
| Pressure Equipment Directive context | Brooks data sheet lists PED 97/23/EC Sound Engineering Practice for the 5866RT platform |
Materials
| Wetted parts | Standard wetted parts are 316L and 316L VAR stainless steel |
| Valve seat options | Standard Viton fluoroelastomer or metal valve seat depending on configured model code |
| Seal options | External and internal seals can be fluoroelastomer or metal, with Buna-N, Teflon, or Kalrez options depending on configuration |
Leak Integrity
| Elastomer seal | 1 x 10^-9 atm cc/sec helium maximum, inbound to outboard |
| Metal seal | 1 x 10^-10 atm scc/sec helium maximum, inbound to outboard |
Connections
| Standard mechanical connections | 1/8 in or 1/4 in stainless steel compression fittings |
| Optional mechanical connections | 1/4 in VCO or VCR options; 5866RT(M) metal-sealed configuration uses 1/4 in VCR |
Installation
| Mounting orientation | May be installed in any position |
| Filter recommendation | Brooks recommends an upstream in-line filter for elastomer 5866RT installations to help prevent foreign material from entering the meter |
Applications
| Application domain | Upstream or downstream gas pressure control with simultaneous flow measurement, including vacuum-chamber pressure regulation, inert-gas feed control, process-vessel pressure control, and flow-related calibration or test service |
Configuration
| Unit-specific details | Gas calibration, full-scale flow, pressure-transducer range, valve behavior, seal package, and fittings vary by configured unit and must be verified from the physical label or build documentation |
Documentation
| Hosted exact model documents | Brooks 5866RT series data sheet and installation/operation manual are available as local PDF downloads |
Documentation Downloads
Local PDF copiesPart Photos
7 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records8Tracked historical listing records
Historical median price$226.54Based on archived listing records
Recorded price range$175.00 - $359.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $188.46 to $345.70. Based on 8 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS INSTRUMENTS 5866RT AIR MASS FLOW PRESSURE CONTROLLER 100 SCCM
- BROOKS Mass Flow Controller 5866RT Ar
- BROOKS Mass Flow Controller 5866RT 300 SCCM HE
Archived listings
Other Part Numbers & Aliases
5866RTBrooks 5866RTBrooks Instrument 5866RTModel 5866RTBrooks Model 5866RT