Wafer Robotics

6-0002-1621-SP

Brooks Automation Wafer-Handling Robot Controller

About this part

6-0002-1621-SP is an exact identifier associated with the Brooks Automation semiconductor wafer-handling equipment. It is classified here as a wafer-handling robot controller. Robot generation, axis count, wafer size, end effector, controller, firmware, cabling, mounting, and OEM integration are assembly-specific

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Documents (1)Photos (5)Listing history

Brooks Automation semiconductor wafer-handling equipment 6-0002-1621-SP wafer-handling robot controller auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Automation semiconductor wafer-handling equipment

Part number6-0002-1621-SP

Product familyConfiguration-specific

Device typeWafer Handling Assembly

Configuration statusConfiguration varies

Application classWafer automation

CategoryWafer Robotics

Specifications

Identification

Manufacturer or brand family	Brooks Automation
Exact archived identifier	6-0002-1621-SP
Product family	Brooks Automation semiconductor wafer-handling equipment
Equipment type	Wafer-handling robot controller

Function

Documented or observed role

Coordinates robot axes, motion commands, safety interlocks, and equipment communications for a matched wafer-handling mechanism

Configuration

Unit-specific boundary

Robot generation, axis count, wafer size, end effector, controller, firmware, cabling, mounting, and OEM integration are assembly-specific

Application

Equipment role

Automated semiconductor substrate handling

Compatibility

Replacement rule

Match the complete Brooks/PRI/Equipe assembly number, revision, controller, and mechanical interface

Configuration and Replacement Boundary

Use the complete 6-0002-1621-SP marking together with the unit nameplate, revision, calibrated range, electrical interface, mechanical connections, and host-equipment documentation. A family resemblance or partial code match does not establish interchangeability.

Archived Unit Context

These statements preserve what sellers recorded for individual units without turning listing text into family-wide specifications.

Brooks Automation ESC-212-S293 (6-0002-1621-SP) Wafer Robot Controller

Documentation Downloads

Local PDF copies

Brooks Automation Atmospheric Single-Arm Robot User Manual Local PDF download

PDF4.9 MB

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$4,499.99Based on archived listing records

Recorded price range$4,499.99 - $4,499.99Low to high recorded listing price

Local documents1PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $4,499.99 to $4,499.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks Automation ESC-212-S293 (6-0002-1621-SP) Wafer Robot Controller

Archived listings

Other Part Numbers & Aliases

6-0002-1621-SPBrooks Automation 6-0002-1621-SP