Flow Control
6256S/6256SCZVCLA
Brooks Instrument Smart Mass Flow Controller Variant
About this part
6256S/6256SCZVCLA is an archive-observed Brooks Instrument Smart Mass Flow configured thermal mass flow controller variant. Exact available evidence identifies 6256SCZVCLA as a Brooks mass flow controller part/model marking, while stored Sonisys auction records and surplus/listing evidence show differing gas and full-scale configurations for this configured code. Brooks official documentation found during research provides related Smart-Series mass-flow-controller context only; No verified official exact 6256S/6256SCZVCLA PDF or build sheet is currently available, so gas, full-scale range, fittings, valve state, connector/wiring option, calibration, and tool compatibility must be verified from the physical unit label and OEM documentation
Unit-specific configuration
Historical listing records identify this part as NF3 at 1 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part identifier | 6256S/6256SCZVCLA |
| Observed exact configured code | 6256SCZVCLA appears as the exact model/part-number marking in listing evidence for this Brooks mass flow controller variant |
| Manufacturer identity | Brooks / Brooks Instrument |
| Device type | Configured Brooks Smart Mass Flow thermal mass flow controller variant |
| Official documentation context | Brooks document-library and hosted PDF evidence supports related Brooks Smart-Series mass-flow-controller family context, but no verified official exact 6256S/6256SCZVCLA PDF is currently available |
| Configured-unit rule | 6256S/6256SCZVCLA should not be treated as one fixed universal gas/range specification; gas, full-scale flow, fittings, valve state, seal package, communication option, calibration, and OEM/tool compatibility vary by the physical unit |
| Family-level control context | Related Brooks Smart-Series documentation describes microprocessor-based thermal mass flow controllers with integral control-valve modules, selectable setpoint/output modes, valve override, and digital communication options on applicable configurations |
| Family-level communications context | Related Brooks Smart-Series documentation describes RS-232, RS-485, service-software, and Profibus-DP context for applicable Smart Mass Flow configurations; actual 6256S/6256SCZVCLA options must be verified from the unit |
| Application domain | Semiconductor process-gas delivery and mass flow control; exact tool fit must be verified from the installed system and unit label |
| Observed gas/range context | Stored Sonisys auction records show NF3 1 SLM for this slug; surplus and listing evidence also shows other item-specific configurations such as AR 500 SCCM, NF3 300 SCCM, and N2 10 SLPM. These are observed configurations only, not official model-wide specifications |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $161.10 to $179.00. Based on 6 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- [7013]BROOKS 6256S/6256SCZVCLA GAS: NF3 FLOW RATE: 1 SLPM/Fedex