Flow Control
6256S/6256SCZVCMAC
Brooks Instrument 6256SCZVCMAC 6256S Smart Mass Flow Controller Variant
About this part
6256SCZVCMAC is a configured model-code variant associated with Brooks 6256S Smart Mass Flow controllers. It should be treated as a 6256S configured code, not a separate product family. Sonisys archive records and surplus/eBay evidence show this code appearing with multiple gas and full-scale flow configurations, including N2O 20 SLM, N2 10 SLM, NF3 5 SLM, O2 20 SLM, Ar 10 SLM, SiH4 0.7 SLM, SiH4 500 SCCM, NH3 500 SCCM, and O2 25 SLM. Technical interpretation should use the canonical 6256S page for Brooks Smart Mass Flow family context, while this page preserves variant-specific auction, pricing, and configuration evidence
Unit-specific configuration
Historical listing records identify this part as N2O at 20 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Device type | Configured Brooks 6256S Smart Mass Flow thermal mass flow controller variant |
| Canonical model | 6256S |
| Configured model code | 6256SCZVCMAC |
| Archive title form | The slash form 6256S/6256SCZVCMAC appears in stored auction titles and should be normalized as 6256S model plus 6256SCZVCMAC configured code |
| Family context | Use the canonical 6256S record for Brooks Smart Mass Flow controller family context; this variant page exists to preserve the configured-code auction history and observed gas/range combinations |
| Configured-unit rule | 6256SCZVCMAC does not define one universal gas/range value; stored and web-observed listing evidence show multiple gas and full-scale flow configurations under the same configured code |
| Smart-series context | Brooks Smart-Series family documentation describes Smart Mass Flow controllers with thermal mass flow sensing, integral control-valve modules, selectable analog and digital interfaces, valve override, and low-flow cutoff; confirm the exact options on the physical 6256SCZVCMAC unit |
| Hosted documentation | The local Brooks 5800-S Smart-Series manual is provided as family-level Smart Mass Flow documentation; no exact official Brooks PDF naming 6256SCZVCMAC was found |
| Stored auction gas/range combinations | N2O 20 SLM, N2 10 SLM, NF3 5 SLM, O2 20 SLM, and Ar 10 SLM |
| Additional web-observed combinations | SiH4 0.7 SLM, SiH4 500 SCCM, NH3 500 SCCM, O2 25 SLM, and NF3 5 SLM appear in surplus/eBay listing evidence for 6256SCZVCMAC |
| Most common stored listing variants | N2O 20 SLM appears in 25 tracked records; N2 10 SLM appears in 24; NF3 5 SLM and O2 20 SLM each appear in 18; Ar 10 SLM appears in 12 |
| Application domain | Semiconductor process-gas mass flow control; this variant appears in gas-delivery auction evidence for process gases including N2O, N2, NF3, O2, Ar, SiH4, and NH3 |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $120.76 to $179.00. Based on 97 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- [7011]BROOKS 6256S/6256SCZVCMAC GAS: N2 FLOW RATE: 10SLPM/Fedex
- [6994]BROOKS 6256S/6256SCZVCMAC GAS:NF3 FLOW RATE:5 SLPM/Fedex
- [6999]BROOKS 6256S/6256SCZVCMAC GAS:N20 FLOW RATE:20 SLP/Fedex
- [7012]BROOKS 6256S/6256SCZVCMAC GAS: O2 FLOW RATE: 20SLPM/Fedex
- [6998]BROOKS 6256S/6256SCZVCMAC GAS:AR FLOW RATE:10 SLPM/Fedex