Wafer Robotics
ABM-107B-1-S-CE-S293
Brooks Automation / PRI Automation Atmospheric Bottom-Mount Wafer Robot
About this part
ABM-107B-1-S-CE-S293 is a three-axis atmospheric wafer-transfer robot from the legacy Brooks Automation / PRI Automation platform. Its documented model code specifies bottom mounting, 7.1-inch vertical travel, a 7.2-inch wide arm, one vacuum circuit, cassette mapping/scanning, and the CE-mark option. S293 is an additional special-configuration suffix whose meaning is not defined in the applicable family manual; replacement and controller compatibility must therefore be matched using the complete model code, serial number, and robot-specific parameter files
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation; legacy PRI Automation / Equipe platform |
| Product type | Atmospheric single-arm wafer-handling robot |
| Mounting arrangement | Atmospheric bottom mount (ABM) |
| Z-axis stroke | 7.1 in |
| Arm geometry | 7.2 in wide arm (107B configuration) |
| Vacuum circuits | Single vacuum circuit (suffix 1) |
| Wafer mapping | Cassette mapper/scanner option (suffix S) |
| Compliance option | CE-mark configuration (suffix CE) |
| Special configuration | S293; function is not defined in the applicable manufacturer family manual |
| Motion axes | Three-axis polar motion: T (theta/rotation), R (radial/reach), and Z (vertical) |
| Intended environment | Cleanroom use; not intended for explosive mixtures, corrosive conditions, high humidity, or dusty environments |
| Operating temperature | 59 to 89 °F (15 to 32.5 °C) |
| Storage temperature | -4 to 104 °F (-20 to 40 °C) |
| Humidity | 10% to 80% relative humidity, non-condensing |
| Maximum operating altitude | 1000 m above sea level |
What Does ABM-107B-1-S-CE-S293 Mean?
The manufacturer’s configuration matrix defines the mounting, mechanical, vacuum, mapping, and CE segments. The final special-build suffix remains undecoded.
| Segment | Field | Interpretation |
|---|---|---|
| ABM | Mounting arrangement | Atmospheric bottom-mount robot |
| 107B | Stroke and arm geometry | 7.1-inch Z stroke with a 7.2-inch wide arm; the manufacturer denotes the wide-arm variant with “b” |
| 1 | Vacuum configuration | One vacuum circuit |
| S | Mapping option | Cassette mapper/scanner |
| CE | Compliance option | CE-mark configuration |
| S293 | Special configuration | Manufacturer meaning is not defined in the family manual; retain the suffix exactly and verify it from the robot label, serial-specific build record, or Brooks documentation |
Controller and Replacement Compatibility
- The robot is one component of a system that normally includes a Brooks Smart Controller (ESC); the exact controller model for this configured unit is not established.
- Brooks specifies a robot-specific parameter file identified by the robot serial number. A replacement robot or controller must use the matching parameter and macro files.
- The ESC-218B-ZT2-CM mentioned in the stored repair listing must not be presented as the required or original controller without label evidence or a manufacturer system record.
- Wafer diameter, payload, end-effector type, scanner model, controller firmware, and customer-tool compatibility are not encoded by the documented portions of this identifier.
Configuration Boundary
ABM-107B is an explicitly supported manufacturer configuration and must not be normalized to the more frequently advertised ATM-107B or ABM-407B models. Generic family drawings and ABM-100 weight data do not establish the dimensions, mass, end effector, or working envelope of this wide-arm configured unit.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $99.99 to $99.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS REPAIR ESC-218B-ZT2-CM,ATM-405-1-S-CE,2002-0095-001,ABM-107B-1-S-CE-S293